AI Fiducial Marker Detection for Stable Reference Point Alignment
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Solution Overview
Problem
Current fiducial recognition processes in semiconductor manufacturing are not robust enough to provide consistent detection or recognition, leading to high variance and standard deviation, and existing solutions to improve fiducial quality increase labor and costs.
Innovation Solution
Integrate a machine vision module with an artificial intelligence module to predict reference points on fiducial markers, using pre-processing techniques and machine learning algorithms to enhance alignment accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional fiducial recognition processes are used, then the manufacturing process can proceed, but the detection consistency and reliability are insufficient leading to high variance
Solution Approach 1:
The patent replaces traditional machine vision algorithms with an artificial intelligence module that uses deep learning neural networks to predict fiducial marker locations. This substitution of the recognition system achieves higher detection consistency and lower variance by learning from training data rather than relying on conventional image processing methods.
Solution Approach 2:
The patent implements a training phase before actual fiducial detection where the AI module is trained with labeled image data containing fiducial markers. This preliminary training action enables the system to achieve reliable and consistent detection performance in subsequent operations by pre-learning the characteristics of fiducial markers under various conditions.
2Measurement precision
If fiducial quality is improved by fine-tuning process parameters and materials, then detection accuracy improves, but labor force and costs increase
Solution Approach 1:
The patent changes the fundamental parameter of the detection system by transitioning from traditional image processing algorithms to an AI-based prediction system. This parameter change allows the system to achieve high detection accuracy without requiring extensive fine-tuning of fiducial manufacturing parameters, thereby reducing setup and evaluation costs.
Solution Approach 2:
The AI module performs self-learning through the training phase where it automatically adjusts its internal parameters and weights to optimize fiducial detection. This self-service capability eliminates the need for manual fine-tuning of process parameters and materials, reducing labor force requirements and manufacturing costs.
Data Source
AI summary
A method for recognizing a reference point associated with a fiducial marker including the steps of: obtaining or receiving image data of the fiducial marker; determining the degree of which the image data of the fiducial marker is aligned with one or more reference images; of which if the degree of alignment is determined to be less than an acceptable threshold predicting a set of coordinates of the reference point associated with the fiducial marker; incorporating the set of coordinates with the image data to form a modified image data; and determining the degree of which the modified image data of the fiducial marker is aligned with one or more reference images.


