AI Fiducial Marker Detection for Stable Reference Point Alignment

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Solution Overview

Problem

Current fiducial recognition processes in semiconductor manufacturing are not robust enough to provide consistent detection or recognition, leading to high variance and standard deviation, and existing solutions to improve fiducial quality increase labor and costs.

Innovation Solution

Integrate a machine vision module with an artificial intelligence module to predict reference points on fiducial markers, using pre-processing techniques and machine learning algorithms to enhance alignment accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If traditional fiducial recognition processes are used, then the manufacturing process can proceed, but the detection consistency and reliability are insufficient leading to high variance

Engineering Contradiction:
Improvefiducial detection consistencyVSAvoiddetection variance
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The patent replaces traditional machine vision algorithms with an artificial intelligence module that uses deep learning neural networks to predict fiducial marker locations. This substitution of the recognition system achieves higher detection consistency and lower variance by learning from training data rather than relying on conventional image processing methods.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent implements a training phase before actual fiducial detection where the AI module is trained with labeled image data containing fiducial markers. This preliminary training action enables the system to achieve reliable and consistent detection performance in subsequent operations by pre-learning the characteristics of fiducial markers under various conditions.

Inventive Principle:
Principle #10Preliminary action

2Measurement precision

If fiducial quality is improved by fine-tuning process parameters and materials, then detection accuracy improves, but labor force and costs increase

Engineering Contradiction:
Improvefiducial detection accuracyVSAvoidsetup and evaluation cost
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The patent changes the fundamental parameter of the detection system by transitioning from traditional image processing algorithms to an AI-based prediction system. This parameter change allows the system to achieve high detection accuracy without requiring extensive fine-tuning of fiducial manufacturing parameters, thereby reducing setup and evaluation costs.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The AI module performs self-learning through the training phase where it automatically adjusts its internal parameters and weights to optimize fiducial detection. This self-service capability eliminates the need for manual fine-tuning of process parameters and materials, reducing labor force requirements and manufacturing costs.

Inventive Principle:
Principle #25Self-service

Data Source

PatentUS12400363B2Device and method for improved fiducial marker detection
Publication Date: 2025.08.26 INTEL CORP
  • US12400363B2 patent drawing
  • US12400363B2 patent drawing
  • US12400363B2 patent drawing

AI summary

A method for recognizing a reference point associated with a fiducial marker including the steps of: obtaining or receiving image data of the fiducial marker; determining the degree of which the image data of the fiducial marker is aligned with one or more reference images; of which if the degree of alignment is determined to be less than an acceptable threshold predicting a set of coordinates of the reference point associated with the fiducial marker; incorporating the set of coordinates with the image data to form a modified image data; and determining the degree of which the modified image data of the fiducial marker is aligned with one or more reference images.