AI-Guided Sublimation Drying for Patterned Substrate Processing
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Solution Overview
Problem
The existing method for substrate processing, which involves filling concavities with a solution containing a solvent and a substance that sublimes, faces challenges in supplying the appropriate amount of solution, leading to potential pattern collapse in substrates due to either insufficient or excessive substance usage, thereby increasing costs and processing time.
Innovation Solution
A substrate processing apparatus that includes a substrate holder, a processing liquid supply section, an input information acquiring section, and a controller, which uses a trained model based on machine learning to acquire and apply optimal sublimation drying process conditions, ensuring proper drying and preventing pattern collapse by adjusting the supply of a processing liquid containing a solvent and a substance that sublimes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the amount of solution containing the substance that sublimes is increased, then the thickness of the substance that sublimes is increased, but the cost and processing time increase
Solution Approach 1:
The patent performs preliminary actions by first filling concavities with a solution containing a solvent and a substance that sublimes, then evaporating the solution to form a solid-state substance before the actual drying process. This preliminary preparation ensures that the substance is already in place and properly distributed, allowing for optimal drying conditions without requiring excessive amounts of material or extended processing time.
Solution Approach 2:
The patent changes parameters by controlling the concentration and amount of the substance that sublimes in the solution, as well as controlling the evaporation conditions. By optimizing these parameters, the patent achieves the right balance between sufficient substance thickness for pattern support and minimal processing time and cost.
2Loss of time
If the amount of solution containing the substance that sublimes is decreased, then the cost and processing time are reduced, but the thickness of the substance that sublimes is reduced, causing collapse of the pattern in the substrate
Solution Approach 1:
The patent performs preliminary actions by first filling concavities with a solution containing a solvent and a substance that sublimes, then evaporating the solution to form a solid-state substance before the actual drying process. This preliminary preparation ensures that the substance is already in place and properly distributed, allowing for optimal drying conditions without requiring excessive amounts of material or extended processing time.
Solution Approach 2:
The patent changes parameters by controlling the concentration and amount of the substance that sublimes in the solution, as well as controlling the evaporation conditions. By optimizing these parameters, the patent achieves the right balance between sufficient substance thickness for pattern support and minimal processing time and cost.
3Reliability
If the amount of substance that sublimes is increased, then the pattern collapse is prevented, but the cost increases
Solution Approach 1:
The patent applies local quality by targeting the substance that sublimes specifically to the concavities in the substrate where it is needed for pattern support. Rather than uniformly applying substance across the entire substrate, the solution is filled into the concavities where it will be retained and evaporated to form solid-state substance only where required, optimizing both effectiveness and cost.
Solution Approach 2:
The patent performs preliminary actions by first filling concavities with a solution containing a solvent and a substance that sublimes, then evaporating the solution to form a solid-state substance before the actual drying process. This preliminary preparation ensures that the substance is already in place and properly distributed, allowing for optimal drying conditions without requiring excessive amounts of material or extended processing time.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively prevents pattern collapse in substrates during the drying process, optimizing the use of processing liquids and reducing costs and processing time by accurately determining the necessary amount and conditions for sublimation drying.
Implementation Method 1
The processing liquid contains a solvent and a substance to sublime. The substrate is subsequently heated to a temperature higher than a sublimation temperature of the substance that sublimes, in order to sublimate the substance that sublimes.
Data Source
AI summary
A substrate processing apparatus includes a substrate holder, a processing liquid supply section, an input information acquiring section, a sublimation drying process condition information acquiring section, and a controller. The input information acquiring section acquires input information including at least one of substrate information and processing liquid information. The sublimation drying process condition information acquiring section acquires, from a trained model based on the input information, sublimation drying process condition information indicating a sublimation drying process condition on a processing target substrate. The controller controls the substrate holder and the processing liquid supply section to perform a sublimation drying process on the process target substrate based on the sublimation drying process condition acquired in the sublimation drying process condition information acquiring section.