Air Bearing Flow Control for Stable Vacuum Preload

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Solution Overview

Problem

Conventional air bearings with vacuum preloading struggle to support a wide range of loads due to the narrowing of the air film region, leading to instability and reduced stiffness, especially under higher loads.

Innovation Solution

An air bearing design incorporating a main body with a bearing surface, flow path, negative pressure generating part, discharge path, and flow rate adjusting part, which adjusts air flow rates based on applied loads to maintain air film stability and support varying loads effectively.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If vacuum preloading is applied to secure air film stiffness, then air film stiffness is improved, but the region for supporting load is narrowed

Engineering Contradiction:
Improveair film stiffnessVSAvoidair film support region
Core Design Contradiction:
StrengthVSArea of stationary object

Solution Approach 1:

The bearing surface is divided into two distinct regions: a vacuum preloading region where air is suctioned to generate preload, and a load support region where compressed air is supplied to form the load-bearing air film. This spatial segmentation allows both vacuum preloading and load support to occur simultaneously without interfering with each other, resolving the contradiction between securing air film stiffness and maintaining load support capacity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The vacuum preloading function is extracted from the entire bearing surface and localized to a specific region. By taking out only the necessary portion for preloading while preserving the remaining area for load support, the system achieves both stiffness enhancement and load-bearing capability without the trade-off present in conventional designs

Inventive Principle:
Principle #2Taking out (Extraction)

2Stability of the object's composition

If vacuum preloading is applied to stabilize air film, then air film stability is improved, but maximum load capacity is reduced

Engineering Contradiction:
Improveair film stabilityVSAvoidmaximum load capacity
Core Design Contradiction:
Stability of the object's compositionVSForce

Solution Approach 1:

The bearing surface is segmented into a vacuum preloading region for stability and a load support region for capacity. This allows the air film to be stabilized through localized vacuum action while the broader region maintains full load-bearing capability, eliminating the inverse relationship between stability and load capacity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Vacuum preloading is applied in advance to a specific region to establish air film stability and preload conditions before the full load is applied. This preliminary stabilization action occurs in a localized area, allowing the remaining regions to accommodate higher loads without compromising overall film stability

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The air bearing effectively supports a wide range of loads by enhancing air film stiffness and maintaining stability through adjustable flow rates, preventing the reduction in maximum load capacity and ensuring consistent performance.

Implementation Method 1

a negative pressure generating part that sucks air between the bearing surface and the guide surface by generating a negative pressure by increasing flow velocity of the passing compressed air

Methodology Applied
Scientific EffectNegative pressure generation through flow velocity increase: Bernoulli Effect

Implementation Method 2

a flow rate adjusting part that adjusts a flow rate of air flowing from the flow path part to the discharge path in accordance with a compressed air pressure corresponding to a load applied to the main body part

Methodology Applied
Scientific EffectFlow rate adjustment based on pressure: Pressure Gradient

Implementation Method 3

When compressed air provided from an exterior compressor to an air bearing is supplied to a guide surface of the guiding mechanism, an air film is generated between a bearing surface and the guide surface of the air bearing. Accordingly, the bearing surface floats from the guide surface

Methodology Applied
Scientific EffectAir film formation: Air Lubrication

Data Source

PatentUS10962053B2Air bearing
Publication Date: 2021.03.30 MITUTOYO CORP
  • US10962053B2 patent drawing
  • US10962053B2 patent drawing
  • US10962053B2 patent drawing

AI summary

An air bearing includes: a main body part having a bearing surface facing a guide surface; a flow path part provided in the main body part; an air film forming part that supplies compressed air flowing through the flow path part to the guide surface to form an air film; a negative pressure generating part that sucks air between the bearing surface and the guide surface, the negative pressure generating part being provided in the flow path part; a discharge path in communication with the flow path part; and a flow rate adjusting part that adjusts a flow rate of air flowing from the flow path part to the discharge path in accordance with a compressed air pressure corresponding to a load applied to the main body part.