Air Bubble Disappearance Simulation in Film Formation

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Solution Overview

Problem

Current simulation methods are inefficient in calculating the disappearance of air bubbles in film forming processes, particularly when considering dissolution and dispersion in a mask, leading to long calculation times and unrealistic processing times for estimating air bubble defects.

Innovation Solution

A simulation method that computes the size and disappearance process of air bubbles by dividing the calculation into grid cells, using equations to model air bubble pressure, volume, and dispersion, allowing for a more efficient calculation of air bubble disappearance in film forming processes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a calculation method considering dissolution and dispersion of air bubbles in a mask is used, then the realism of the simulation is improved, but the calculation time becomes excessively long

Engineering Contradiction:
Improverealism of simulationVSAvoidcalculation time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The simulation process is divided into two distinct steps: a first step that computes air bubble size and trapping time during film formation, and a second step that calculates the disappearance process using pre-computed data from the first step. This segmentation allows the complex simulation to be broken down into manageable parts that can be executed more efficiently

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The first step performs preliminary calculations of air bubble size and trapping time before the main disappearance calculation. By pre-computing these parameters, the second step can focus solely on the disappearance process without recalculating fundamental bubble characteristics, significantly reducing overall computation time

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces calculation time and allows for the realistic estimation of air bubble disappearance and defects in film forming processes, improving the efficiency of film formation simulations.

Implementation Method 1

Air bubbles in a film dissolve, disperse, and eventually disappear in a mask and the film

Methodology Applied
Scientific EffectDissolution: Solvation

Implementation Method 2

Air bubbles in a film dissolve, disperse, and eventually disappear in a mask and the film

Methodology Applied
Scientific EffectDispersion: Dispersion (of waves)

Data Source

PatentUS12175170B2Simulation method, simulation device, and storage device
Publication Date: 2024.12.24 CANON KK
  • US12175170B2 patent drawing
  • US12175170B2 patent drawing
  • US12175170B2 patent drawing

AI summary

In order to provide an efficient and favorable simulation method for obtaining the disappearance of a number of air bubbles in one entire shot or the like, for example, there is provided a simulation method for simulating a film forming process of forming a film by coating an upper part of a substrate with a curable composition in a form of a plurality of droplets and bringing a mold into contact therewith. The simulation method includes a first step of computing a size of each air bubble at a time when air bubbles become trapped due to the mold brought into contact therewith and a time of becoming trapped, and a second step of obtaining a disappearing process of each of the air bubbles on the basis of information of the size of each of the air bubbles and the time.