Air Circuit Interlock for Vacuum Gas Valves
Solution Overview
Problem
Existing vacuum processing apparatuses lack a robust interlock mechanism to prevent simultaneous operation of gas valves, which can lead to dangerous gas mixtures, leakage, and contamination, necessitating both electrical and mechanical safety measures to ensure safe and reliable operation.
Innovation Solution
A vacuum processing apparatus with a gas supply unit featuring an air circuit that uses electromagnetic valves and logic circuits (OR or AND configurations) to control air-driven valves, ensuring that specific pairs of valves cannot be opened simultaneously, thereby implementing a hard interlock mechanism.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If software interlock is used to control valve operations, then the control flexibility is improved, but the reliability is insufficient as a foolproof function
Solution Approach 1:
The interlock function is segmented into two independent parts: software interlock for control flexibility and hardware interlock (air circuit) for foolproof reliability. Each part performs its function independently without relying on the other, ensuring that software failures do not compromise safety.
Solution Approach 2:
An air circuit intermediary is introduced between the control system and the valves. The air circuit acts as a mechanical mediator that physically prevents valve opening when conditions are not met, providing a hardware-based foolproof function that operates independently of software.
2Extent of automation
If electromagnetic valves are used to control air supply to gas valves, then the automation is improved, but the risk of gas mixture and leakage increases
Solution Approach 1:
The air circuit is designed to pre-establish safe valve operation sequences. Before gas valves can be opened, the air circuit must first establish the proper pressure conditions and valve states, preventing dangerous gas mixtures from occurring in the first place.
Solution Approach 2:
The air circuit provides continuous feedback on the operational state of gas valves through pressure sensors and interlock signals. This feedback mechanism automatically adjusts air supply to electromagnetic valves to maintain safe operating conditions and prevent gas leakage or mixing.
3Productivity
If multiple gas valves are operated simultaneously according to complex recipe steps, then the processing efficiency is improved, but the durability and cleanliness of valves deteriorate
Solution Approach 1:
The air circuit dynamically adjusts air pressure and flow distribution to gas valves based on real-time processing requirements. This dynamic control optimizes valve operation cycles, reducing unnecessary opening/closing actions and extending valve durability while maintaining high processing efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration provides a reliable and safe operation by preventing simultaneous valve openings, reducing the risk of gas mixtures and leakage, and enhancing the apparatus's foolproof function through dual interlock mechanisms.
Implementation Method 1
an electromagnetic valve (21, 24, 25) having a solenoid coil (S0-S22) corresponding to each of the pair of the air-driven valves
Data Source
AI summary
The present invention provides a vacuum processing apparatus that includes gas supply means having a hard interlock of a pair of gas valves.The present invention provides a vacuum processing apparatus including: a gas supply unit that supplies gas, for performing vacuum processing using normally closed type air-driven valves, to a processing chamber where the vacuum processing is performed, the gas supply unit having an interlock function in which, when a first valve of a pair of the air-driven valves is opened, a second valve of the pair is closed, the gas supply unit including an air circuit that controls air for driving the air-driven valves, the air circuit being configured using an electromagnetic valve having a solenoid coil corresponding to each of the pair of the air-driven valves.