Air conditioner, unit for floating conveying substrate with air conditioner, and method of supplying air for floating conveying substrate
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Solution Overview
Problem
Conventional air conditioners face instability in temperature control due to environmental temperature fluctuations, leading to fluctuations in air supply, making it difficult to maintain precise temperature control for substrate processing, especially in applications like semiconductor manufacturing where temperature variations are not permitted.
Innovation Solution
An air conditioner with a blower unit, a cooling unit with a variable frequency compressor, and a heating unit, controlled by a compressor control part that adjusts the compressor's speed based on thermal dose and pressure thresholds, ensuring stable air temperature control without adjusting air amount, and an air passage path with thermal management to alleviate pressure-induced temperature variations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the air conditioner adjusts the air amount to control temperature, then the temperature control range is improved, but the air amount stability deteriorates
Solution Approach 1:
The patent applies dynamics by making the blower's air amount adjustable based on environmental conditions. The control unit dynamically changes the air amount discharged by the blower according to the ambient temperature and humidity, rather than maintaining a fixed air amount. This dynamic adjustment allows the system to maintain temperature stability within the control room while adapting to external environmental fluctuations, thereby resolving the contradiction between temperature control range and air amount stability.
2Quantity of substance
If the air conditioner uses fixed air amount for temperature control, then the air amount stability is improved, but the temperature control precision deteriorates under environmental fluctuations
Solution Approach 1:
The patent applies parameter changes by adjusting the air amount parameter discharged by the blower in response to changes in ambient temperature and humidity parameters. The control unit monitors environmental parameters and modifies the air amount parameter to compensate for their effects on temperature control precision. This parameter adjustment mechanism maintains both air amount stability and temperature control precision under varying environmental conditions.
3Temperature
If the air conditioner increases cooling capacity to handle high temperature waves, then the temperature control range is improved, but the energy consumption increases
Solution Approach 1:
The patent applies partial action by adjusting the air amount discharged by the blower to match the actual cooling or heating needs based on environmental conditions. Rather than continuously operating at maximum capacity, the system provides just enough air movement to maintain temperature control within the acceptable range. This partial action approach extends the temperature control range while avoiding excessive energy consumption that would result from continuous high-capacity operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables precise control of air temperature and air amount, maintaining stability and accuracy in substrate processing environments, even under fluctuating conditions, by prioritizing thermal dose control and using thermal management to mitigate pressure-induced temperature variations.
Implementation Method 1
a compressor (11) which is operated at a variable operating frequency so that a revolving speed thereof is adjustable
Implementation Method 2
a condenser (12), and a cooling coil (14) are connected in this order by pipes (15) in order to circulate a refrigerant
Implementation Method 3
a cooling coil (14) are connected in this order by pipes (15) in order to circulate a refrigerant
Implementation Method 4
a heating unit (20) arranged on a downstream side of the cooling unit (10) in the air flowing direction in which the blown air is heated by the heater (21)
Data Source
AI summary
An air conditioner includes a blower unit to blow air at a predetermined amount, a cooling unit arranged downstream of the blower unit in an air flowing direction, a compressor which is operated at a variable operating frequency so that a revolving speed thereof is adjustable, a condenser, and a cooling coil connected in this order by pipes to circulate a heating medium to cool blown air with a heating unit arranged on a downstream side of the cooling unit in the air flowing direction in which the blown air is heated by a heater, and a control unit controls the operating frequency of the compressor and includes a compressor control part which adjusts the revolving speed of the compressor such that the operating frequency of the compressor is decreased by a predetermined frequency when an output of the heating unit exceeds a first threshold value.