Air Curtain Device Pressure Limiting Module for Semiconductor Fabrication
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Solution Overview
Problem
The existing air curtain devices used in semiconductor fabrication processes experience fluctuations in air pressure, leading to instability in gas flow and potential ejection of foreign matter, which can induce defects in the array substrate during the wet stripping process.
Innovation Solution
An air curtain device with a pressure limiting module that includes a pressure linking member capable of adjusting the cross-sectional area of the air outlet to maintain a preset pressure range, utilizing a connecting rod with a floater and air stoppers, and a hemisphere flying gyro to stabilize the gas flow, along with bionic membrane flaps for backup flow pathways and an electrically conductive system for monitoring.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If the gas flow input through the gas inlet increases suddenly, then the air curtain device can handle higher flux, but the pressure at the air outlet fluctuates and the isolating function deteriorates
Solution Approach 1:
The patent employs a pressure-linked movable stopper that dynamically adjusts the air outlet opening area in response to pressure changes. When gas flow flux increases, the stopper moves to reduce the opening area, maintaining stable output pressure and isolating function. This dynamic adjustment mechanism resolves the contradiction between handling higher flux and maintaining reliability.
Solution Approach 2:
The patent implements a feedback mechanism where the output pressure directly controls the air outlet opening area through the pressure-linked stopper. The system automatically senses pressure changes and adjusts the opening area accordingly, creating a closed-loop control that stabilizes the isolating function regardless of input flux variations.
2Productivity
If the gas flow flux increases suddenly, then higher throughput is achieved, but foreign matter may be ejected and defects induced
Solution Approach 1:
The movable stopper dynamically adjusts the air outlet opening area based on real-time pressure conditions. When throughput increases and pressure rises, the stopper automatically reduces the opening area to maintain stable flow conditions, preventing foreign matter ejection while allowing high productivity operation.
Solution Approach 2:
The pressure-linked stopper mechanism anticipates potential foreign matter ejection by preemptively adjusting the opening area in response to pressure increases. This preliminary action prevents the harmful effect before it occurs, maintaining safe operating conditions even at high throughput levels.
3Reliability
If a pressure limiting module with movable stopper is added, then output pressure stability is improved, but device complexity increases
Solution Approach 1:
The pressure-linked stopper is designed to automatically adjust the air outlet opening area in response to pressure changes without external control systems. The mechanism uses the process pressure itself to drive the adjustment, eliminating the need for complex sensors, actuators, or control circuits while maintaining excellent pressure stability.
Solution Approach 2:
The patent uses pneumatic pressure linkage to connect the pressure sensing function with the stopper actuation. The output pressure directly acts on the stopper mechanism through pressure linkage, converting pressure changes into mechanical displacement that adjusts the opening area. This pneumatic approach simplifies the control system compared to electronic alternatives.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution ensures a stable and consistent gas flow output, reducing the risk of defects and improving the yield of semiconductor substrate fabrication by maintaining a stable pressure and preventing foreign matter ejection.
Implementation Method 1
the pressure linking member is capable of changing a cross-sectional area of the first air outlet through which a gas flow passes in accordance with variation of pressure in the pressure limiting chamber
Implementation Method 2
The pressure linking member comprises a connecting rod which is arranged along an air input direction, the connecting rod is provided with a floater at an end close to the air inlet and a first air stopper at an end close to the first air outlet. Under the action of the gas flow, the floater drives the first air stopper to move up and down by means of the connecting rod
Implementation Method 3
The pressure linking member comprises a hemisphere flying gyro, a fixed bearing which is movably connected with the hemisphere flying gyro, and a balancing weight which is arranged symmetrically with respect to the hemisphere flying gyro. Under the action of the gas flow, the hemisphere flying gyro is capable of rotating in the pressure limiting chamber by taking the fixed bearing as a center
Data Source
AI summary
An air curtain device is provided. The air curtain device comprises a pressure limiting module, and an air curtain body communicating with the pressure limiting module. The pressure limiting module is provided with a pressure limiting chamber, which has an air inlet connected with a gas source and a first air outlet communicating with the air curtain body. The pressure limiting chamber is provided with a pressure linking member, which is capable of changing a cross-sectional area of the first air outlet through which the gas flow passes in accordance with variation of pressure in the pressure limiting chamber, so that the gas flow output from the first air outlet has a pressure which is kept in a preset range. This ensures a stable flux for the gas flow output from the air curtain device, and increases the yield for fabricating the array substrate.