Air Flotation Nano-Positioning Platform With Shock Damping

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Solution Overview

Problem

Existing nano-positioning platforms face challenges with external vibration interference causing shaking and reduced positioning accuracy, and instantaneous changes in sliding direction leading to shortened part life, especially when trying to achieve large strokes with high precision and load-bearing capacity.

Innovation Solution

A large-stroke air flotation type nano-positioning platform is designed with a base platform equipped with a linear motor, a bearing platform, and shock absorption assemblies to reduce vibration transmission, featuring air flotation support modes that include shock absorption columns, assembly joints, and auxiliary air flotation elements to maintain stability and precision.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Length of moving object

If piezoelectric ceramic actuators with amplification mechanisms are used to achieve large stroke, then stroke is improved, but positioning accuracy deteriorates due to vibration and shaking

Engineering Contradiction:
ImprovestrokeVSAvoidpositioning accuracy
Core Design Contradiction:
Length of moving objectVSMeasurement precision

Solution Approach 1:

The patent introduces an air flotation bearing as an intermediary between the moving platform and the base platform. This air bearing creates a non-contact support system that mediates the interaction between the high-speed linear motor and the positioning platform, effectively isolating vibration while enabling large-stroke motion.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces traditional mechanical contact support systems with an air flotation bearing system. This substitution eliminates mechanical friction and contact-induced vibration, allowing the platform to achieve large stroke through the linear motor without the positioning accuracy degradation caused by mechanical interference.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Stability of the object's composition

If traditional mechanical support structures are used to ensure stability, then stability is improved, but vibration transmission increases reducing positioning accuracy

Engineering Contradiction:
Improvestructural stabilityVSAvoidvibration transmission
Core Design Contradiction:
Stability of the object's compositionVSObject-affected harmful factors

Solution Approach 1:

The air flotation bearing serves as a mediator that decouples the structural stability function from vibration transmission. It provides stable support for the platform while simultaneously blocking the transmission path of vibration from the linear motor to the positioning system.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent employs pneumatic principles through the air flotation bearing, using compressed air to create a stable, non-contact support film. This pneumatic system provides structural stability while inherently damping vibration, as the compressible air film absorbs mechanical disturbances without transmitting them rigidly.

Inventive Principle:
Principle #29Pneumatics and hydraulics

3Productivity

If high-speed linear motor is used to achieve large stroke and high speed, then productivity is improved, but vibration generation increases affecting positioning accuracy

Engineering Contradiction:
Improvehigh-speed motion capabilityVSAvoidvibration generation
Core Design Contradiction:
ProductivityVSObject-generated harmful factors

Solution Approach 1:

The air flotation bearing acts as a vibration-isolating intermediary between the high-speed linear motor and the positioning platform. It allows the motor to operate at high speeds for improved productivity while preventing the generated vibration from affecting the platform's positioning accuracy.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent converts the harmful vibration generated by the high-speed linear motor into a beneficial damping effect through the air flotation bearing. The compressible air film transforms vibrational energy into minimal heat through viscous dissipation, while the primary effect is vibration isolation that protects positioning accuracy.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The platform achieves high stability and precision by consuming vibration through shock absorption and providing multiple air flotation support modes, reducing the impact of external vibrations and ensuring accurate positioning without the need for special components, thus extending part life and reducing maintenance costs.

Implementation Method 1

an air flotation bearing is installed below the air flotation platform to achieve air flotation support while sliding

Methodology Applied
Scientific EffectAir flotation: Air Lubrication

Implementation Method 2

the piston squeezes the cavity to consume the vibration and reduce the vibration transmission

Methodology Applied
Scientific EffectVibration consumption: Damping

Data Source

PatentUS12098749B1Large-stroke air flotation type nano-positioning platform
Publication Date: 2024.09.24 WUXI XIVI SCI & TECH CO LTD
  • US12098749B1 patent drawing
  • US12098749B1 patent drawing
  • US12098749B1 patent drawing

AI summary

A platform comprises a base platform, a linear motor is provided on the base platform and connected with an air flotation platform, a bearing platform is provided below the air flotation platform, a plurality of shock absorption assemblies are embedded in the base platform and arranged at intervals below the bearing platform, the shock absorption assembly comprises a bottom plate, shock absorption columns are symmetrically provided on an upper end of the bottom plate, a piston is cooperatively arranged in the shock absorption column, a cavity is formed between a bottom end of the piston and an inner wall of the shock absorption column, a sliding rod is fixed on an upper end of the piston, and an assembly joint is connected to a top end of the sliding rod and to a bottom end of the bearing platform.