Solid-State Imaging Device Air Gap Array for Quantum Efficiency
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Solution Overview
Problem
Solid-state imaging devices with connected color filter and microlens structures suffer from reduced quantum efficiency due to light loss from diagonally entering light passing through one color segment to an adjacent segment, and high fabrication costs associated with integrated color filter and microlens elements.
Innovation Solution
A gap array is introduced between color filter components and microlens elements, separating them and allowing air to fill the gaps, enhancing quantum efficiency and reducing fabrication costs by enabling the use of less material and simpler fabrication processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If connected color filter profile is used, then structural integrity is maintained, but quantum efficiency decreases due to light loss in adjacent color segments
Solution Approach 1:
The color filter profile is divided into separate color segments (red, green, blue) that are electrically isolated from each other using gap arrays. This segmentation prevents light from one color segment from reaching adjacent segments, thereby eliminating the quantum efficiency loss while maintaining the structural framework through the substrate.
Solution Approach 2:
A gap array structure is introduced as an intermediary element between adjacent color segments. This gap array provides electrical isolation and physical separation, preventing the harmful optical crosstalk between segments while allowing the overall structure to maintain integrity through the substrate support.
2Productivity
If connected microlens structure is used, then light collection is optimized, but fabrication cost increases due to integrated structure complexity
Solution Approach 1:
The microlens structure is segmented into individual microlenses corresponding to each color segment, rather than forming a continuous connected structure. This segmentation simplifies the fabrication process by allowing independent formation of each microlens while maintaining optimal light collection for each pixel element.
Solution Approach 2:
The microlens array is formed as a separate layer above the color filter segments, creating a multi-layered structure. This dimensional separation allows independent optimization of light collection for each microlens while simplifying fabrication by decoupling the microlens formation process from the color filter patterning process.
3Loss of energy
If separated color filter components are used, then quantum efficiency is enhanced by preventing light loss, but device complexity increases
Solution Approach 1:
The gap array structure serves a dual function: it provides electrical isolation between color segments and simultaneously acts as the separation structure for the microlens array. By merging these two functions into a single structural element, the patent reduces overall device complexity while achieving the quantum efficiency enhancement through separation of color filter components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The separation of color filter and microlens components with a gap array enhances quantum efficiency by preventing light loss and optimizing light path, while reducing fabrication costs through reduced material usage and simplified processes.
Implementation Method 1
The gap is filled with air. The quantum efficiency (QE) of the solid-state imaging devices is enhanced by disposing the gap array between the color filter components
Data Source
AI summary
A solid-state imaging device is provided. The solid-state imaging device includes a semiconductor substrate containing a plurality of photoelectric conversion elements. A color filter layer includes a first color filter component and a second color filter component separated from each other and disposed above the semiconductor substrate. A microlens structure includes a first microlens element and a second microlens element separated from each other and disposed on the first and second color filter components respectively. The solid-state imaging device also includes a gap filled with air. The gap is disposed between the first and second color filter components and also between the first and second microlens elements.