Air-Introduced Nozzle Tip Structure for Stable Meniscus Control

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Solution Overview

Problem

The increased diameter of nozzle outlets in semiconductor manufacturing leads to processing liquid leakage and contamination, particularly with low-viscosity liquids, causing substrate damage and reduced productivity due to droplet formation and phenomena like the Taylor cone and air pocket.

Innovation Solution

A nozzle design incorporating a connector with air inlets that introduces air into the nozzle body and tip to separate the processing liquid when supply is stopped, forming a stable meniscus and preventing droplet formation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If the nozzle outlet diameter is increased to increase the amount of processing liquid discharged, then the processing liquid discharge amount is improved, but processing liquid leakage and droplet formation occur more frequently

Engineering Contradiction:

Improveprocessing liquid discharge amountVSAvoidprocessing liquid leakage and droplet formation

Core Design Contradiction:

Quantity of substanceVSObject-generated harmful factors

Solution Approach 1:

Air is introduced as an intermediary substance into the nozzle body through the air inlet, forming a gas-liquid two-phase flow that prevents processing liquid from adhering to the inner wall and dripping after supply stops

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The physical state of the fluid inside the nozzle is changed by introducing air, creating a two-phase flow system that alters the surface tension and adhesion characteristics of the processing liquid, preventing droplet formation

Inventive Principle:

Principle #35Parameter changes

2Object-affected harmful factors

If processing liquid supply is stopped to prevent contamination, then substrate quality is improved, but processing liquid remains in the nozzle and may leak intermittently

Engineering Contradiction:

Improvesubstrate contaminationVSAvoidprocessing liquid leakage prevention

Core Design Contradiction:

Object-affected harmful factorsVSReliability

Solution Approach 1:

Air acts as a barrier and cleaning medium, pushing remaining processing liquid away from the outlet and preventing intermittent leakage when supply is stopped

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The nozzle system performs self-cleaning by introducing air that automatically removes residual processing liquid from the flow path, eliminating the need for manual intervention

Inventive Principle:

Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Prevents processing liquid droplet formation and stabilizes the meniscus, enhancing substrate quality and productivity without requiring changes to other components.

Implementation Method 1

the surface tension is significantly reduced. For such reasons, even after sucking-back, the processing liquid in the supply line flows into the nozzle side, and is easily leaked to the outside

Methodology Applied

Scientific EffectSurface tension: Surface Tension

Implementation Method 2

forming a stable meniscus and preventing droplet formation

Methodology Applied

Scientific EffectMeniscus formation: Surface Tension

Data Source

PatentUS12525470B2Nozzle and substrate processing apparatus including the same

Publication Date: 2026.01.13 SYSTEM ENGINEERING MEGA SOLUTION CO LTD

AI summary

According to an embodiment of the present disclosure, a processing liquid supply nozzle includes a nozzle body, a nozzle tip member connected to a lower portion of the nozzle body, and a fastening member that is disposed between the nozzle body and the nozzle tip member to connect the nozzle body and the nozzle tip member to each other and introduces air into the nozzle body and the nozzle tip member.