Air Pocket Detection in Single Crystal Materials

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Solution Overview

Problem

Current methods for detecting air pockets in single crystal materials, such as silicon ingots, are inadequate for ensuring structural integrity and product quality, as they fail to accurately identify voids before further processing or shipment, potentially leading to manufacturing failures.

Innovation Solution

A computer-implemented method and system that uses near-infrared light to capture image data, processes it to determine differences in a matrix of data units, calculates an index value based on these differences, and identifies air pockets by comparing the value to a predetermined threshold, distinguishing between circular and non-circular anomalies based on symmetry.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If current detection methods are used, then detection capability is limited, but manufacturing failures occur due to missed air pocket detection

Engineering Contradiction:
Improveproduct qualityVSAvoidair pocket detection accuracy
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The image data is divided into multiple blocks, with each block processed independently to calculate local symmetry metrics. This segmentation allows the system to detect air pockets at different locations simultaneously while maintaining high measurement precision through localized analysis of each block's symmetry properties

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system performs multiple operations on the same image data including blocking, symmetry calculation, and index computation beyond what traditional single-pass methods do. This excessive processing action ensures reliable detection by analyzing the data from multiple angles and computing various symmetry metrics to confirm air pocket presence

Inventive Principle:
Principle #16Partial or excessive action

2Measurement precision

If image data is processed to determine symmetry, then air pocket detection accuracy improves, but processing complexity increases

Engineering Contradiction:
Improveair pocket detection accuracyVSAvoidprocessing complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The invention exploits the asymmetry introduced by air pockets in otherwise symmetric crystal structures. By calculating symmetry metrics and comparing them against threshold values, the system achieves high detection accuracy while maintaining manageable processing complexity through efficient symmetry algorithms

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The system transforms the two-dimensional image data into a symmetry metric space, adding a new dimensional perspective for analysis. By computing symmetry indices and comparing them in this transformed space, the system achieves accurate air pocket detection without requiring complex three-dimensional reconstruction or additional processing dimensions

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Measurement precision

If symmetry analysis is performed on image data, then detection precision improves, but processing time increases

Engineering Contradiction:
Improvedetection precisionVSAvoidprocessing time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

By dividing the image into blocks and processing each block independently for symmetry analysis, the system achieves detection precision through localized symmetry metrics while reducing overall processing time through parallel processing of multiple blocks simultaneously

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system performs multiple symmetry calculations and index computations on the same data blocks to ensure detection precision, but this excessive action is applied selectively only to blocks containing regions of interest rather than the entire image, thereby managing processing time effectively

Inventive Principle:
Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Effectively detects air pockets within single crystal materials by analyzing image data symmetry, preventing further processing of defective ingots and ensuring product reliability by identifying anomalies before they cause manufacturing issues.

Implementation Method 1

a light source configured to emit near-infrared (NIR) light toward a material, a detection device positioned adjacent to the material to capture image data based on light passing through the material

Methodology Applied
Scientific EffectNear-infrared light transmission: Infrared Radiation

Data Source

PatentUS9665931B2Air pocket detection methods and systems
Publication Date: 2017.05.30 GLOBALWAFERS CO LTD
  • US9665931B2 patent drawing
  • US9665931B2 patent drawing
  • US9665931B2 patent drawing

AI summary

Methods and systems for use in detecting an air pocket in a single crystal material are described. One example method includes providing a matrix including a plurality of data units, the plurality of data units including image data related to a region of interest of the single crystal material; determining, by a processor, a difference between data units of the matrix and a corresponding data unit of the matrix, wherein the corresponding data unit is defined by a first operation of the matrix; calculating, by the processor, a first index value based on the differences of the corresponding data units; and identifying an air pocket within the single crystal material based on the first index value and a predetermined threshold.