Air Pressure Sensor Substrate Gap Design
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Solution Overview
Problem
Conventional air pressure sensor devices require a cover to protect the ambient air contacting region, leading to increased height and cost due to the need for an additional protective layer.
Innovation Solution
The air pressure sensor element is bonded to a supporting substrate with its ambient air contacting surface facing the substrate, forming a gap through which ambient air flows, eliminating the need for a separate cover by using the substrate to protect the sensor element.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a cover is arranged to cover the ambient air contacting region of the sensor element, then the sensor element is protected from contact, but the device height increases and cost increases
Solution Approach 1:
The patent merges the protective function with the supporting substrate by bonding the sensor element directly to the substrate with the ambient air contacting surface facing the substrate. The substrate itself serves as the protective structure, eliminating the need for a separate cover. This integration reduces device height while maintaining protection of the sensor element.
Solution Approach 2:
The patent extracts the cover component from the device structure by using the supporting substrate to directly protect the sensor element. The substrate is positioned and configured to provide the necessary protection without requiring an additional cover layer, thereby reducing overall device height.
2Reliability
If a cover is arranged to cover the ambient air contacting region of the sensor element, then the sensor element is protected from contact, but the device cost increases
Solution Approach 1:
The patent combines the protective function into the supporting substrate, eliminating the need for a separate cover component. This reduces the number of parts required, simplifies manufacturing processes, and lowers overall device cost while maintaining adequate protection of the sensor element.
Solution Approach 2:
The patent removes the cover component from the device structure by using the supporting substrate to directly protect the sensor element. This extraction of the cover reduces part count, simplifies assembly, and decreases manufacturing cost.
3Length of moving object
If the ambient air contacting surface faces the supporting substrate, then the device height is reduced and cost is reduced, but the ambient air contacting region must remain exposed to air
Solution Approach 1:
The patent applies local quality by creating a gap between the ambient air contacting surface and the supporting substrate. This gap is specifically positioned to allow ambient air to reach the contacting region while the rest of the sensor element remains protected by the substrate. The local gap structure enables simultaneous achievement of compact height and proper air exposure.
Solution Approach 2:
The patent resolves the contradiction by transitioning from a two-dimensional planar arrangement to a three-dimensional structure with a controlled gap. By positioning the ambient air contacting surface in a specific spatial relationship to the substrate (facing the substrate but separated by a gap), the design allows air access while maintaining compact overall height.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces the height and cost of the device while ensuring the ambient air contacting region is exposed to air for accurate pressure detection without hindrance.
Implementation Method 1
A strain gauge resistor (unillustrated) is formed in the movable portion 613A. The movable portion 613A of the diaphragm 613 undergoes strain in accordance with a difference between a pressure (reference pressure) inside the cavity and an ambient air pressure. The strain amount is detected as an amount of change in electrical resistance value of the strain gauge resistor to detect the ambient air pressure.
Data Source
AI summary
An electronic part (air pressure detecting device) 1 includes a sensor element (air pressure sensor element) 2 that includes an ambient air contacting surface S including an ambient air contacting region Sa to be exposed to ambient air, and a supporting substrate 4, arranged to support the sensor element 2. The sensor element 2 is bonded to one surface 4a of the supporting substrate 4 in a state where its ambient air contacting surface S faces the one surface 4a of the supporting substrate 4 and a gap, through which the ambient air flows, is formed between the ambient air contacting surface S and the one surface 4a of the supporting substrate 4.