Clean Room Air Sampling Pipeline Cleaning Using Water Mist
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Solution Overview
Problem
Existing systems for monitoring airborne contaminants in clean rooms face challenges with longer cleaning times and lower sampling frequencies due to residual contaminants in sampling pipelines, which affect the accuracy of data collected.
Innovation Solution
A system comprising a sampling device, an analysis device, an air supply device, and a humidification device, where the humidification device provides water mist to the system sampling pipeline, facilitating quicker removal of residual contaminants and improving data accuracy by shortening cleaning times and increasing sampling frequency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If dry gas is used to clean the sampling pipeline, then the cleaning process is simple, but the cleaning time is long and residual contaminants remain
Solution Approach 1:
The patent changes the physical and chemical parameters of the cleaning medium from dry gas to water mist. This parameter change allows the cleaning medium to interact differently with contaminants, specifically solubilizing them for faster and more complete removal, thereby reducing cleaning time while improving data accuracy.
Solution Approach 2:
The patent utilizes the phase transition of water from liquid to fine mist droplets. This phase transition creates a large surface area water medium that can rapidly evaporate and effectively contact and solubilize contaminants in the sampling pipeline, achieving both time reduction and reliability improvement.
2Measurement precision
If sampling frequency is increased, then monitoring accuracy improves, but cleaning time must be reduced
Solution Approach 1:
By changing the cleaning medium parameters from dry gas to water mist, the patent achieves faster contaminant removal kinetics. This allows for shorter cleaning cycles between samples, enabling increased sampling frequency while maintaining high measurement precision through complete contaminant removal.
3Loss of time
If water mist is used to clean the sampling pipeline, then cleaning time is reduced and data accuracy improves, but device complexity increases
Solution Approach 1:
The patent introduces water mist as an intermediary cleaning medium between the air supply device and the sampling pipeline. This intermediary substance facilitates rapid contaminant removal through solubilization, achieving the desired time reduction and accuracy improvement while the complexity is managed through the straightforward integration of a humidification device.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively reduces cleaning times, enhances sampling frequency, and ensures higher accuracy of airborne contaminant data by utilizing water mist to solubilize and remove residual contaminants, thereby improving the monitoring efficiency in clean rooms.
Implementation Method 1
utilizing water mist to solubilize and remove residual contaminants
Data Source
AI summary
A system for monitoring an environment can be used for monitoring concentrations of airborne contaminants in a plurality of process areas in a clean room. The system includes: a sampling device, configured to collect environmental samples from process areas and including a system sampling pipeline, the environmental sample including air; an analysis device, connected to an output end of the system sampling pipeline; an air supply device, connected to the system sampling pipeline and configured to provide a purge gas to the system sampling pipeline; and a humidification device, configured to provide water mist and connected between the air supply device and the system sampling pipeline.