Multi-Zone Air Turn Pressure Control for Flat Web Deposition

Solution Overview

Problem

Conventional deposition apparatus face challenges in controlling the flatness and deflection of flexible substrates during material deposition, leading to non-uniform thicknesses and inefficiencies in energy storage device manufacturing.

Innovation Solution

The use of a multi-zone air turn system with a body, porous cover, and seals to control fluid pressure in different zones, providing independent fluid supply and pressure control to maintain substrate flatness and support during deposition.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional rotatable rollers are used for substrate transport, then the substrate can be moved through the deposition apparatus, but the flatness and deflection control of the substrate deteriorates, resulting in non-uniform deposition

Engineering Contradiction:

Improvesubstrate flatnessVSAvoidroller mechanism complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The air turn is divided into multiple independent zones (first zone, second zone, third zone) separated by seals, with each zone having independent fluid openings. This segmentation allows differential pressure control in different regions to precisely manage substrate flatness and deflection during transport and deposition.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The invention replaces mechanical rotatable rollers with a pneumatic air bearing system. Fluid is supplied through openings in the air turn body to create air bearings that support the substrate, eliminating mechanical contact and enabling precise control of substrate position and flatness through pressure regulation.

Inventive Principle:

Principle #29Pneumatics and hydraulics

2Manufacturing precision

If independent fluid supply to multiple zones is implemented, then substrate flatness control is improved, but the device complexity increases

Engineering Contradiction:

Improvedeposition uniformityVSAvoidfluid supply system complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The air turn is divided into multiple independent zones (first zone, second zone, third zone) separated by seals, with each zone having independent fluid openings. This segmentation allows differential pressure control in different regions to precisely manage substrate flatness and deflection during transport and deposition.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different zones of the air turn are provided with different fluid opening configurations to create localized pressure variations. The first zone has openings for primary support, while the second and third zones have openings for controlling edge deflection, allowing each region to be optimized for its specific function in maintaining substrate flatness.

Inventive Principle:

Principle #3Local quality

3Manufacturing precision

If seals are positioned to define multiple zones, then substrate support precision is improved, but the risk of damage to coated surfaces increases

Engineering Contradiction:

Improvesubstrate support precisionVSAvoidrisk of substrate damage

Core Design Contradiction:

Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The invention replaces mechanical rotatable rollers with a pneumatic air bearing system. Fluid is supplied through openings in the air turn body to create air bearings that support the substrate, eliminating mechanical contact and enabling precise control of substrate position and flatness through pressure regulation.

Inventive Principle:

Principle #29Pneumatics and hydraulics

Solution Approach 2:

The air bearing system provides a cushioning layer of fluid between the substrate and the air turn body, preventing direct contact and potential damage to the substrate or its coated surfaces while maintaining precise positional control.

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach ensures uniform coating thickness and prevents web deflection, maintaining substrate flatness and preventing damage to previously coated surfaces, while allowing for differential heating and temperature compensation.

Implementation Method 1

an air bearing commonly known as an air turn

Methodology Applied

Scientific EffectAir bearing: Air Lubrication

Data Source

PatentUS11898602B2Multi-zone air turn for transport of a flexible substrate

Publication Date: 2024.02.13 ELEVATED MATERIALS US LLC

AI summary

Methods and apparatus for transporting a flexible substrate are provided. In one embodiment, an air turn is disclosed that includes a body, a porous cover disposed about a circumference of the body, and two seals. Each of the two seals are positioned about the circumference of the body and spaced apart from each other in a longitudinal direction of the body to define a central zone bounded by a second zone and by a third zone. The second zone and third zone are each positioned outside of a respective seal. The body includes a first opening formed along a longitudinal axis of the body, and a plurality of second openings formed in the body at a position other than along the longitudinal axis.