Airflow Blocking Member for Substrate Floating Plate
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Solution Overview
Problem
Existing substrate processing apparatuses face issues with suction holes clogging due to airflow and substrate deformation, leading to impact point errors and defective printing, as the gas emission and suction pressures are sensitive to environmental changes and substrate type, causing variations in floating height and substrate warpage.
Innovation Solution
A substrate processing apparatus with an airflow blocking member, including blades with a slope to generate upward airflow, and an airflow induction member to prevent turbulence, which blocks airflow between the substrate and floating plate, and adjustable components to maintain precise floating height and prevent suction hole clogging.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If gas emission pressure and gas suction pressure are adjusted to float the substrate, then the substrate can be floated to the required height, but the suction holes become clogged by airflow and treatment liquid mist, causing floating height variations and printing defects
Solution Approach 1:
The gap between the substrate and floating plate is segmented into two zones: an upper region allowing treatment liquid mist passage and a lower region blocked by the airflow blocking member to prevent airflow entry. This segmentation enables differential control of fluid passages, allowing mist to reach suction holes while blocking harmful airflow that causes clogging
Solution Approach 2:
The airflow blocking member acts as an intermediary element positioned in the gap between substrate and floating plate. It selectively blocks airflow while permitting treatment liquid mist to pass through, serving as a mediator that differentiates between harmful gas flow and useful liquid aerosol transport
2Object-affected harmful factors
If the substrate is floated using gas emission and suction, then the lower surface can be protected, but substrate deformation such as warpage occurs due to external forces and environmental changes, causing impact point errors
Solution Approach 1:
The airflow blocking member is positioned in advance to prevent airflow from entering the gap between substrate and floating plate before the substrate can be deformed by warpage. This preliminary blocking action prevents the chain reaction of airflow-induced clogging and subsequent floating height variations that lead to printing errors
3Productivity
If mist of treatment liquid is sucked into suction holes with airflow, then the substrate can be cleaned, but the suction holes become clogged, changing gas suction pressure and floating height
Solution Approach 1:
Different regions of the gap have different quality requirements: the upper region allows mist passage for cleaning functionality while the lower region blocks airflow to maintain stable floating height. The airflow blocking member creates this local quality differentiation in the gap region
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances printing precision by preventing suction hole clogging and substrate deformation, allowing for accurate floating and rapid substrate transfer, thereby increasing productivity and reducing equipment downtime.
Implementation Method 1
a gas supply line connected to one or more emission holes provided in the floating plate to supply a gas to the emission holes
Implementation Method 2
a gas suction line connected to one or more suction holes provided in the floating plate to suck a gas through the suction holes
Implementation Method 3
a left adsorption pad provided on a left side of an upper surface of the floating plate and having at least a portion higher than the floating plate to adsorb a left side of a lower surface of the substrate through one or more vacuum adsorption holes
Data Source
AI summary
Provided is a substrate processing apparatus and method capable of preventing suction holes from being clogged due to airflow generated when a substrate is floated and printed, and the substrate processing apparatus includes a substrate stage for supporting a substrate, and a treatment liquid ejection device mounted above the substrate stage to eject a treatment liquid onto the substrate, wherein the substrate stage includes a floating plate for floating at least a portion of the substrate, and an airflow blocking member for blocking at least a portion of a gap between the substrate and the floating plate to block airflow flowing into the gap.