Airtight Rotating Sample Holder for 3D Electron Microscopy
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Solution Overview
Problem
Current sample holders for electron microscopes and FIB processing apparatuses fail to perform three-dimensional analysis of materials sensitive to atmospheric exposure, such as organic EL devices and lithium ion batteries, as they do not prevent exposure to the atmosphere during conveyance, gas flow, heating, or light irradiation, requiring complex manipulation and inefficient gas formation.
Innovation Solution
A sample holder with a rotatable sample stage capable of forming an airtight chamber around the sample, allowing for 360-degree rotation and controlled gas introduction, thereby enabling three-dimensional analysis without exposing the sample to the atmosphere.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a sample holder enables 360-degree rotation for three-dimensional analysis, then observation capability is improved, but the sample is exposed to the atmosphere during conveyance and processing
Solution Approach 1:
The patent introduces a gas introduction mechanism that creates an inert or controlled atmosphere environment within the sample holder chamber. This allows the sample to be rotated 360 degrees for three-dimensional analysis while remaining protected from harmful atmospheric exposure through gas sealing and controlled atmosphere maintenance during rotation and conveyance operations.
Solution Approach 2:
The sample holder is divided into separate functional chambers: a conveyance chamber for moving the sample and an observation chamber for 360-degree rotation and analysis. This segmentation allows the sample to be protected during conveyance while enabling full rotational observation capability when positioned in the observation chamber, resolving the contradiction between movement and protection.
2Adaptability or versatility
If gas is introduced into the chamber for atmospheric control, then chemical reaction capability is improved, but the system complexity increases
Solution Approach 1:
The gas introduction mechanism serves multiple functions simultaneously: it creates controlled atmosphere for chemical reactions, protects the sample from harmful atmospheric exposure during conveyance, and maintains a sealed environment for 360-degree rotation. This multi-functionality reduces the need for separate systems and lowers overall complexity despite the added capability.
Solution Approach 2:
The patent uses a gas sealing mechanism as an intermediary between the external atmosphere and the sample chamber. This intermediary component enables controlled gas introduction for chemical reactions while maintaining isolation and protection, allowing chemical reaction capability without proportionally increasing system complexity through a focused intermediary solution.
3Object-affected harmful factors
If the sample holder structure is made airtight for atmospheric protection, then sample protection is improved, but ease of operation deteriorates
Solution Approach 1:
The patent extracts the atmospheric protection function into a separate, dedicated sealing system that can be independently operated. The airtight chamber and gas sealing mechanisms are designed as modular components that can be opened, closed, and pressurized/depressurized as discrete operations, making the complex airtight structure easier to operate through standardized, isolated control steps.
Data Source
AI summary
Disclosed is a charged particle radiation apparatus capable of capturing a change in a sample due to gaseous atmosphere, light irradiation, heating or the like without exposing the sample to atmosphere. The present invention relates to a sample holder provided with a sample stage that is rotatable around a rotation axis perpendicular to an electron beam irradiation direction, the sample holder being capable of forming an airtight chamber around the sample stage. A sample is allowed to chemically react in any atmosphere, and three-dimensional analysis on the reaction is enabled. A sample liable to change in atmosphere can be three-dimensionally analyzed without exposing the sample to the atmosphere.