ALD Coated Gas Container for Reactive Gas Purity
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Solution Overview
Problem
Existing gas containers, particularly those for high-purity and reactive gas mixtures, face challenges due to chemical reactions with container materials, leading to purity loss and limited storage time, and existing pretreatment methods are inconvenient, expensive, and not universally applicable.
Innovation Solution
A gas container with a coating of monomolecular layers produced by the ALD process, using materials like Al2O3, SiO2, TiO2, and Ta2O5, applied directly to the base material to prevent chemical reactions, allowing for diverse gas compatibility and reduced contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional container materials (aluminum, stainless steel) are used with pretreatment operations, then chemical reaction resistance is improved, but manufacturing cost and operational complexity increase significantly
Solution Approach 1:
The patent applies a composite coating structure consisting of multiple monomolecular layers deposited by ALD process on the container inner wall. This composite coating combines different materials (e.g., aluminum oxide, silicon oxide, titanium oxide) to achieve superior chemical inertness and reaction resistance, eliminating the need for expensive pretreatment operations while maintaining reliability with high-purity and reactive gases.
Solution Approach 2:
The patent changes the surface properties of the container by depositing nanoscale monomolecular layers through ALD process. By controlling the thickness and composition parameters of each layer at the molecular level, the coating achieves optimal chemical resistance and compatibility with various gases, resolving the contradiction between reliability and manufacturing cost.
2Reliability
If conventional container materials are used with repeated pretreatment operations, then gas purity is maintained, but operational convenience and versatility decrease
Solution Approach 1:
The patent performs preliminary action by depositing multiple monomolecular protective layers on the container inner wall during manufacturing using ALD process. This preliminary coating action creates a permanently protective barrier that eliminates the need for repeated pretreatment operations before each gas filling, significantly improving operational convenience while maintaining gas purity.
Solution Approach 2:
The multi-layer ALD coating provides universal protection against chemical reactions with various types of gases including high-purity gases and reactive gas mixtures. The coating's composition can be tailored to be compatible with different gases, making the container versatile and eliminating the need for gas-specific pretreatment procedures.
3Reliability
If conventional pretreatment operations are used for gas mixtures, then chemical compatibility is improved, but adaptability to different gas types is limited
Solution Approach 1:
The patent applies local quality by creating a multi-layer coating with each layer having specific material properties tailored to resist reactions with particular gas components. The ALD process allows precise control over each layer's composition and thickness, providing localized chemical resistance properties that ensure compatibility with diverse gas mixtures while maintaining overall adaptability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The ALD-coated gas container effectively prevents chemical reactions with the base material, enabling the use of less expensive steel for high-purity and reactive gases, extending storage time and maintaining gas purity, while being cost-effective and adaptable for various gases.
Implementation Method 1
This coating corresponds here to a coating which comprises a plurality of layers, produced by an ALD (Atomic Layer Deposition) process, of at least one coating material
Implementation Method 2
a protective layer is formed thereon with the gas to be filled, by means of adhering gas atoms or gas molecules
Data Source
AI summary
A gas container having coating on the inner side that is applied directly onto a base material (110) of the gas container. The coating has a plurality of layers of at least one coating material that may be produced by an ALD method.