ALD Coated Powder Spraying for Plasma Chamber Components
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Solution Overview
Problem
Existing coatings for plasma processing chamber components have poor stoichiometry control and microscale/macroscale spatial variation due to inadequate mixing during application, leading to inadequate protection against plasma etching.
Innovation Solution
The use of atomic layer deposition (ALD) coated particles with a core material and a distinct ALD coating material, applied through spraying processes like aerosol deposition or thermal spraying, to achieve well-defined stoichiometry and intimate mixing, resulting in a robust and uniform mixed-metal oxide coating.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If single chemistry powder material is used with tightly controlled particle distribution, then particle melt temperature can be controlled, but coating stoichiometry control and uniformity deteriorate when mixed chemistry powders are needed
Solution Approach 1:
The coating process is segmented into two distinct stages: first, ALD coating is applied to individual particles to establish precise stoichiometry at the particle level; second, these pre-coated particles are sprayed onto the substrate to form the final coating. This segmentation allows stoichiometry control during ALD while enabling mixed chemistry in the final coating.
Solution Approach 2:
The ALD coating is applied to particles as a preliminary action before the spraying process. This preliminary coating establishes the desired stoichiometry and composition on each particle, which then serves as the basis for the final coating structure when particles are deposited on the substrate.
2Strength
If aerosol deposition is used with single chemistry powder precursor, then mechanical properties and shock-wave based deformation are achieved, but material diffusion between different types of particles is poor
Solution Approach 1:
Material diffusion and mixing are performed as a preliminary action during the ALD coating stage on individual particles, before the particles are deposited via aerosol deposition. This ensures intimate mixing occurs at the particle level while the aerosol process provides the mechanical strength through shock-wave deformation.
Solution Approach 2:
The ALD coating acts as an intermediary that facilitates material diffusion and mixing between different chemistry components on particle surfaces, enabling intimate mixing that would otherwise be poor in aerosol deposition of mixed powders.
3Stability of the object's composition
If spraying process is used with mixed chemistry powders, then mixed stoichiometry can be achieved, but particle mixing during application is inadequate leading to spatial variation
Solution Approach 1:
The coating application is segmented into pre-coated particles being sprayed, rather than spraying mixed powders. Each particle arrives at the substrate with its stoichiometry already established, eliminating spatial variation problems during the spraying process while maintaining mixed chemistry composition.
Solution Approach 2:
The process changes from spraying mixed powders (where composition varies spatially during application) to spraying pre-coated particles (where composition is fixed before application). This parameter change from mixed-powder spraying to pre-coated-particle spraying eliminates spatial variation while preserving mixed stoichiometry.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach provides a highly uniform and robust coating with controlled stoichiometry and phase structure, enhancing plasma etch resistance and mechanical strength while reducing porosity and intrinsic stresses, thus improving the protection of plasma processing chamber components.
Implementation Method 1
spraying a surface of the component body with a spray formed from atomic layer deposition (ALD) coated particles
Implementation Method 2
spraying a surface of the component body with a spray formed from atomic layer deposition (ALD) coated particles
Implementation Method 3
applied through spraying processes like aerosol deposition or thermal spraying
Data Source
AI summary
A component for use in a plasma processing chamber is provided. A component body has a plasma facing surface. A coating is over the plasma facing surface, wherein the coating is formed by a method comprising spraying a surface of the component body with a spray formed from atomic layer deposition (ALD) coated particles to form the coating.