ALD Part Coating Chamber With Multi-Zone Throughput Control
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Solution Overview
Problem
The high cost and long cycle time associated with coating reactor parts, such as gas distribution faceplates and showerheads, due to conventional batch coating processes that take several days per batch, result in high per unit costs despite the benefit of coating multiple parts simultaneously.
Innovation Solution
A part coating reactor system is designed with a lid assembly and lower body that includes annular heater grooves, gas supply and purge grooves, and a blocker plate to facilitate efficient atomic layer deposition, allowing for rapid and cost-effective coating of reactor components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If conventional batch coating process is used, then multiple parts can be coated simultaneously, but the coating cycle time is very long (3-8 days per batch)
Solution Approach 1:
The batch reactor is segmented into multiple independent coating zones (first coating zone, second coating zone, third coating zone) that can operate simultaneously or independently. Each zone has its own gas distribution faceplate, heater, and process control, allowing parallel processing of multiple parts without the long cycle times of traditional single-zone batch reactors.
Solution Approach 2:
The patent transitions from a single batch processing dimension to multiple concurrent processing dimensions by creating vertically stacked coating zones. The reactor body contains multiple levels (first, second, third coating zones) that can process parts simultaneously, effectively adding a vertical dimension to the coating operation to increase throughput.
2Quantity of substance
If conventional batch coating process is used, then coating of multiple parts is enabled, but the per unit cost remains very high
Solution Approach 1:
The reactor design uses universal, reusable components such as the gas distribution faceplates and showerheads that can be coated repeatedly. The faceplates are designed with standardized features (gas distribution holes, peripheral lips, alignment features) that allow them to serve multiple batches and multiple coating zones, reducing per-unit costs through economies of scale and reusability.
Solution Approach 2:
The multi-zone reactor enables continuous or near-continuous coating operation by eliminating the long idle time between batches. While one zone is being coated, other zones can be prepared or are already in process, maintaining continuous productive action and reducing the time-cost burden that drives up per-unit expenses.
3Productivity
If rapid coating is achieved through ALD process, then throughput is enhanced, but precise control of deposition parameters is required
Solution Approach 1:
Each coating zone has its own dedicated gas distribution faceplate with specifically positioned gas distribution holes, its own heater with independently controlled temperature, and its own process parameters. This localized control allows precise management of deposition conditions in each zone while maintaining overall system productivity through parallel operation.
Solution Approach 2:
The patent employs atomic layer deposition (ALD) process parameters such as controlled temperature (via independent heaters), precise gas flow rates (via mass flow controllers), and sequential precursor/purge cycles to achieve rapid yet precise coating. The parameter changes are carefully managed through automated control systems that coordinate multiple zones simultaneously.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system reduces coating cycle time by an order of magnitude, enhancing throughput and reducing costs by enabling faster and more efficient deposition of materials on parts like showerheads and substrate support pedestals.
Implementation Method 1
a first heater ring disposed in a first annular heater groove... and a second heater ring disposed in a second annular heater groove... each having one or more heating elements disposed therein
Implementation Method 2
rapid and cost-effective coating of reactor components... enabling faster and more efficient deposition of materials on parts like showerheads and substrate support pedestals
Data Source
AI summary
Embodiments of part coating reactors are provided herein. In some embodiments, a part coating reactor includes a lid assembly, comprising: a body that includes a central region and a peripheral region, wherein the body includes a central opening in the central region, a first annular heater groove disposed radially outward of the central opening, and a second annular heater groove disposed radially outward of the first annular heater groove, wherein the peripheral region includes a plurality of vertical slots that extend from an upper surface of the body, and wherein a lower surface of the body includes an annular alignment groove; and a blocker plate including a substantially flat plate having a plurality of holes disposed therethrough and an annular wall extending above and below the flat plate, wherein an upper surface of the annular wall is disposed in the annular alignment groove of the body.