ALD Coating Complex Chamber Channels via Pressure Differential
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Solution Overview
Problem
Conventional atomic layer deposition (ALD) techniques are inefficient for coating components with complex internal structures, such as those with high aspect ratios or large internal volumes, as they rely on diffusion, which is slow and ineffective, leading to long coating times and uneven coverage.
Innovation Solution
A method involving a supply apparatus and an exhaust apparatus coupled to the channels of a processing chamber component to create a pressure differential, facilitating the rapid flow and deposition of ALD precursors through the component's internal channels, allowing for the efficient application of a corrosion-resistant coating using multiple cycles of precursor delivery and evacuation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If conventional ALD techniques relying on diffusion are used to coat components with complex internal structures, then the coating process is simple to implement, but the coating time becomes excessively long and coverage becomes uneven
Solution Approach 1:
The patent applies pneumatic principles by using a pressure differential system where a supply apparatus pressurizes ALD precursor gases and forces them through the component's internal channels via outlets, while an exhaust apparatus creates negative pressure to evacuate the channels. This pneumatic-driven flow mechanism replaces slow diffusion with rapid forced convection, dramatically increasing coating speed while ensuring uniform precursor distribution throughout complex internal structures
Solution Approach 2:
The patent implements periodic action through cyclic operation of the supply and exhaust apparatus. The process alternates between precursor delivery phases (where supply apparatus introduces precursors and exhaust evacuates) and reaction/evacuation phases (where exhaust removes reaction byproducts and supply prepares for next cycle). This periodic cycling ensures continuous fresh precursor supply to all internal surfaces while maintaining controlled reaction conditions, achieving both high coating speed and uniform coverage
2Ease of manufacture
If conventional ALD techniques relying on diffusion are used to coat components with complex internal structures, then the equipment setup is simple, but the coating uniformity deteriorates in high aspect ratio channels
Solution Approach 1:
The pressure differential system ensures uniform precursor distribution by forcing gases through all channels at controlled flow rates. The supply apparatus maintains positive pressure to drive precursors through high aspect ratio channels, while the exhaust apparatus creates uniform negative pressure to evacuate all channels simultaneously. This balanced pneumatic control eliminates the concentration gradients and uneven coverage that occur with passive diffusion, achieving uniform coating thickness even in complex geometries
Solution Approach 2:
The patent changes the fundamental parameter of precursor transport from diffusion-based (passive, concentration-gradient driven) to pressure-driven (active, force-driven). By controlling pressure differentials between supply and exhaust apparatus, the system can optimize flow rates, residence times, and precursor distribution uniformly across all channels regardless of their geometry, ensuring consistent coating quality throughout the component
3Device complexity
If conventional ALD techniques are used on components with large internal volumes, then the process requires minimal equipment modification, but the coating time increases significantly
Solution Approach 1:
The pneumatic pressure differential system enables rapid filling and evacuation of large internal volumes. The supply apparatus can deliver high volumes of precursor gases under pressure through the component's internal channels, and the exhaust apparatus can quickly evacuate these large volumes. This forced convection mechanism reduces the time required for precursors to reach all internal surfaces and for reaction byproducts to be removed, dramatically decreasing coating time for large-volume components while maintaining manageable equipment complexity
Solution Approach 2:
The cyclic operation of supply and exhaust apparatus creates efficient periodic cycles for large internal volumes. Each cycle delivers fresh precursors, allows reaction, then evacuates byproducts and excess precursors. This periodic action prevents precursor depletion and ensures continuous coating progression throughout the entire internal volume, reducing total coating time compared to slow diffusion processes while requiring only moderate equipment modifications
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the rapid and uniform deposition of a corrosion-resistant coating on complex internal surfaces, significantly reducing coating time and preserving the desirable characteristics of the component materials, even when components are manufactured from multiple bodies bonded together.
Implementation Method 1
delivering a first reactant from the supply apparatus through the one or more channels to cause the first reactant to adsorb onto the interior surface of the one or more channels
Implementation Method 2
delivering a second reactant from the supply apparatus through the one or more channels to cause the second reactant to react with the first reactant adsorbed onto the interior surface of the one or more channels
Data Source
AI summary
A method includes affixing a supply apparatus to inlets for one or more channels of a chamber component. The channels provide one or more gas flow paths between a first side of the chamber component that comprises the inlets and a second side of the chamber component comprising outlets of the one or more channels. The method further includes affixing an exhaust apparatus to the outlets of the one or more channels. The method further includes performing a plurality of atomic layer deposition cycles to deposit a corrosion resistant coating on interior surfaces of the one or more channels of the chamber component.