ALD Reactor Door Air Cooling With Shell Heat Exchanger

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Solution Overview

Problem

Conventional atomic layer deposition (ALD) apparatuses face issues with thermal stress, safety concerns due to high operating temperatures, and inefficient cooling methods, particularly water cooling systems that risk water damage and algae growth, while external insulators introduce dust risks and size limitations.

Innovation Solution

An ALD apparatus utilizing a cooling arrangement that employs surrounding room air to cool the reactor door through a shell structure, heat exchanger element, and ventilation discharge connection, eliminating the need for external insulators and water cooling, and incorporating radiation shields to prevent heat ingress.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If water cooling is used to cool the pressure vessel, then cooling effectiveness is improved, but the risk of water leakage and water damage increases

Engineering Contradiction:

Improvecooling effectivenessVSAvoidrisk of water leakage and water damage

Core Design Contradiction:

TemperatureVSReliability

Solution Approach 1:

The patent removes the water cooling system entirely and replaces it with an air-based cooling arrangement. The cooling function is extracted from the water cooling system and implemented through a separate air circulation system with cooling channels and ventilation connections, eliminating the risks associated with water leakage while maintaining cooling effectiveness.

Inventive Principle:

Principle #2Taking out (Extraction)

2Use of energy by moving object

If internal heaters are used to heat the pressure vessel, then heating efficiency is improved, but the heated mass increases slowing down heating and cooling

Engineering Contradiction:

Improveheating efficiencyVSAvoidheating and cooling time

Core Design Contradiction:

Use of energy by moving objectVSLoss of time

Solution Approach 1:

The heating system is segmented into multiple independent heating zones with separate heating elements positioned at different locations within the reaction chamber. This segmentation allows selective heating of specific areas, improving heating efficiency while reducing the overall heated mass by targeting only the necessary regions rather than heating the entire vessel uniformly.

Inventive Principle:

Principle #1Segmentation

3Temperature

If externally heated reactors are used, then temperature control is improved, but the apparatus size increases due to lengthy tubular structures

Engineering Contradiction:

Improvetemperature controlVSAvoidapparatus size

Core Design Contradiction:

TemperatureVSLength of stationary object

Solution Approach 1:

The heating elements are nested within the reaction chamber structure itself, with heating zones integrated into the chamber walls and floor. This nested arrangement allows temperature control to be achieved within the existing apparatus footprint, eliminating the need for lengthy external tubular heating structures while maintaining effective temperature control.

Inventive Principle:

Principle #7Nested doll (Nesting)

4Loss of energy

If insulators are used to reduce heat loss, then energy efficiency is improved, but dust formation in the clean room increases

Engineering Contradiction:

Improveheat lossVSAvoiddust formation

Core Design Contradiction:

Loss of energyVSObject-generated harmful factors

Solution Approach 1:

The patent removes traditional insulators that generate dust and replaces them with a closed-circuit air cooling system. The cooling function is achieved through controlled air circulation in sealed channels, eliminating the need for dusty insulating materials while maintaining energy efficiency through active thermal management.

Inventive Principle:

Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Effectively cools the reactor door without increasing the apparatus size, ensuring safety and maintaining operating temperatures, while avoiding water-related issues and dust contamination, thus enhancing operational efficiency and safety.

Implementation Method 1

The cooling arrangement uses surrounding room air for cooling... the air flowing in the cooling channel passes through the heat exchanger element such that heat energy of the air coming from outside of the apparatus is conducted from the air intakes into the heat transfer element and further from the heat transfer element to the end edge of the reactor for cooling the end edge

Methodology Applied

Scientific EffectConvection: Convection

Implementation Method 2

heat energy of the air coming from outside of the apparatus is conducted from the air intakes into the heat transfer element and further from the heat transfer element to the end edge of the reactor for cooling the end edge

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS12624451B2Atomic layer deposition apparatus

Publication Date: 2026.05.12 BENEQ OY

AI summary

An atomic layer deposition apparatus including an atomic layer deposition reactor and a reactor door. The reactor door is arranged against the end edge of the reactor in a closed position of the reactor. The apparatus having a cooling arrangement for cooling the reactor door having a shell structure surrounding the reactor from the outside of the reactor such that a cooling channel is formed between the shell structure and the at least one side wall of the reactor; a heat exchanger element arranged in the cooling channel in an area of the end edge; and a ventilation discharge connection in connection with the cooling channel provided at a distance from the edge end.