ALD Nanolaminate Encapsulation for OLED Moisture Barrier

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Solution Overview

Problem

Existing thin-film encapsulations for optoelectronic components, such as OLEDs, have low optical transmission for visible light, making them inadequate for protecting sensitive organic materials from moisture and oxygen while maintaining transparency.

Innovation Solution

A thin-film encapsulation with a layer sequence comprising alternating atomic layer deposition (ALD) layers of titanium oxide and lanthanum oxide, optionally combined with additional layers deposited by thermal vapor deposition or plasma-assisted processes, to create a nanolaminate structure that enhances both barrier effectiveness and optical transmission.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a thin-layer encapsulation is used to protect against moisture and oxygen, then the protection effectiveness is improved, but the optical transmission for visible light deteriorates

Engineering Contradiction:
Improveprotection against moisture and oxygenVSAvoidoptical transmission for visible light
Core Design Contradiction:
ReliabilityVSIllumination intensity

Solution Approach 1:

The patent applies composite materials by creating a nanolaminate structure consisting of alternating layers of titanium oxide and lanthanum oxide. This multi-material composite approach allows the encapsulation to simultaneously achieve high barrier properties against moisture and oxygen while maintaining good optical transmission for visible light, resolving the contradiction between protection effectiveness and optical transparency.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The encapsulation layer is segmented into multiple thin alternating layers of different materials (titanium oxide and lanthanum oxide) rather than using a single homogeneous layer. This segmentation into nanoscale lamellae enables each material to contribute its specific properties - titanium oxide providing barrier function and lanthanum oxide providing optical transparency - thereby resolving the contradiction between protection and transparency.

Inventive Principle:
Principle #1Segmentation

2Illumination intensity

If the encapsulation layer thickness is reduced to improve optical transmission, then the transparency is improved, but the barrier effectiveness against moisture and oxygen deteriorates

Engineering Contradiction:
Improveoptical transmission for visible lightVSAvoidbarrier against moisture and oxygen
Core Design Contradiction:
Illumination intensityVSReliability

Solution Approach 1:

By using composite nanolaminate structure with alternating titanium oxide and lanthanum oxide layers, the patent achieves high barrier effectiveness despite reduced overall thickness. The composite nature allows light to pass through the transparent lanthanum oxide layers while the titanium oxide layers provide the necessary barrier function, thus resolving the contradiction between thinness for transparency and thickness for barrier effectiveness.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

Different regions of the encapsulation structure are assigned different local qualities - titanium oxide layers are positioned to provide barrier function while lanthanum oxide layers are positioned to provide optical transparency. This local differentiation of material properties within the nanolaminate structure allows the thin encapsulation to simultaneously achieve both transparency and barrier effectiveness.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution achieves a high optical transmission of at least 70% for visible light while maintaining a robust barrier against moisture and oxygen, suitable for flexible substrates and various optoelectronic components like OLEDs and organic photovoltaic cells.

Implementation Method 1

a first ALD layer deposited by means of atomic layer deposition, which consists of titanium oxide, and a second ALD layer deposited by means of atomic layer deposition, consisting of lanthanum oxide

Methodology Applied
Scientific EffectAtomic layer deposition: Chemical Vapour Deposition

Data Source

PatentEP2412040B1Thin-layer encapsulation for an optoelectronic component, method for the production thereof, and optoelectronic component
Publication Date: 2018.07.18 OSRAM OLED
  • EP2412040B1 patent drawingFigure 1~2B
  • EP2412040B1 patent drawingFigure 3~4
  • EP2412040B1 patent drawingFigure 5

AI summary

The invention relates to a thin-layer encapsulation (1) for an optoelectronic component. The thin-layer encapsulation (1) comprises a sequence of layers (2) that comprises the following layers: a first ALD layer (3) deposited by means of atomic layer deposition, and a second ALD layer (4) deposited by means of atomic layer deposition. The invention further relates to a method for producing the thin-layer encapsulation and to an optoelectronic component having such a thin-layer encapsulation.