ALD Part Coating Chamber for Faster Multi-Part Reactor Coating
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Solution Overview
Problem
The high cost and long cycle time associated with coating reactor parts, such as gas distribution faceplates and showerheads, in conventional batch processes, result in high per unit costs despite the benefits of coating multiple parts simultaneously.
Innovation Solution
A part coating reactor system with a lower body and lid assembly that includes heaters, coolant channels, gas passages with independent plenums, and mounting brackets, facilitating atomic layer deposition (ALD) processes to reduce cycle time and cost by enabling efficient coating of multiple parts simultaneously.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If conventional batch reactor coating process is used, then multiple parts can be coated simultaneously, but the cycle time is very long (3-8 days per batch) and per unit cost remains high
Solution Approach 1:
The batch reactor is segmented into multiple independently controllable coating zones or stations, allowing different parts to be coated at different stages simultaneously. This enables continuous processing where parts move through different coating zones, reducing the overall cycle time while maintaining the ability to coat multiple parts at once.
Solution Approach 2:
Parts are pre-positioned and pre-heated in preparation zones before entering the main coating chambers. This preliminary preparation reduces the actual coating time and allows for smoother transitions between coating stages, thereby reducing the total cycle time while maintaining high throughput.
2Quantity of substance
If conventional batch reactor coating process is used, then multiple parts can be coated simultaneously, but the per unit cost is very high
Solution Approach 1:
The coating process is transformed from batch operation to continuous operation, where parts are constantly being coated without the idle time between batches. This continuous processing increases equipment utilization, reduces labor costs per unit, and eliminates the downtime associated with batch loading and unloading, thereby significantly reducing per unit cost while maintaining high production volume.
Solution Approach 2:
The reactor system incorporates dynamic control of coating parameters such as gas flow rates, temperature, and deposition rates, allowing optimization for different part types and coating requirements. This dynamic adjustment enables efficient coating of various parts in sequence without requiring multiple specialized reactors, reducing overall manufacturing cost.
3Reliability
If complex reactor part structures (showerheads, faceplates) are coated, then functional requirements are met, but coating time increases to 3-8 days
Solution Approach 1:
Different zones of the reactor are configured with specific local conditions (temperature, gas composition, flow patterns) optimized for coating different regions of complex parts. This allows simultaneous coating of multiple surfaces with different requirements, reducing total coating time while maintaining the functional quality needed for showerheads and faceplates.
Solution Approach 2:
The coating process utilizes multiple spatial dimensions and angles of gas delivery to coat complex three-dimensional parts more efficiently. By introducing precursors from multiple directions and utilizing rotational mechanisms, all surfaces of complex parts can be coated simultaneously rather than sequentially, dramatically reducing coating time while ensuring complete coverage and functional performance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system significantly reduces cycle time and cost by allowing for the efficient coating of multiple parts, achieving an order of magnitude improvement in productivity and reducing the per unit cost of coated parts.
Implementation Method 1
one or more heaters disposed in the lid assembly
Implementation Method 2
one or more coolant channels disposed in the lid assembly to flow a heat transfer medium therethrough
Implementation Method 3
one or more thermal conduction chokes provided in the lid assembly to facilitate reduction of heat transfer away from the upper central portion of the lid assembly above the interior volume
Implementation Method 4
performing an ALD process on the fastened workpiece within the part coating reactor
Data Source
AI summary
Methods and apparatus for coating processing reactor component parts are provided herein. In some embodiments, a method for coating a part via atomic layer deposition includes: fastening a workpiece to be coated to an interior volume facing portion of a part coating reactor; and performing an ALD process on the fastened workpiece within the part coating reactor.