ALD Particle Coating With Isolated Vibration

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Solution Overview

Problem

Existing deposition methods for particulate materials using Atomic Layer Deposition (ALD) face challenges in achieving uniform coatings due to agglomeration and incomplete exposure of particles to precursor gases, leading to non-uniformity and inefficiencies in coating processes.

Innovation Solution

The method involves using a deposition reactor with a substrate vessel and an isolated vibration source to cause movements in particulate material within the reactor, employing a top-to-bottom precursor flow and ultrasonic vibrations to prevent agglomeration and ensure uniform exposure to chemical reactants, thereby improving coating uniformity and efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If particles are stationary in the substrate vessel, then the structure is simple, but coating uniformity deteriorates due to agglomeration and incomplete exposure to precursor gases

Engineering Contradiction:

Improvecoating uniformityVSAvoidreactor structure

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

An isolated vibration source is introduced to cause movements in the particulate material within the substrate vessel during coating. The vibration prevents particle agglomeration and ensures all particle surfaces are exposed to precursor gases, thereby achieving uniform coatings without requiring complex fluidization systems

Inventive Principle:

Principle #18Mechanical vibration

Solution Approach 2:

The vibration source is elastically isolated from the reactor body using isolation elements (such as springs or dampers) to transmit mechanical vibrations to the substrate vessel while preventing vibration transmission to the reactor walls. This intermediary isolation mechanism enables particle movement without complicating the overall reactor structure

Inventive Principle:

Principle #24Intermediary (Mediator)

2Productivity

If vibration is transmitted to the reactor body, then particle movement is achieved, but vibration loss and structural interference occur

Engineering Contradiction:

Improvecoating efficiencyVSAvoidvibration loss

Core Design Contradiction:

ProductivityVSLoss of energy

Solution Approach 1:

The vibration source is isolated from the reactor body, extracting the vibration function from the main reactor structure. This allows vibrations to be applied locally to the substrate vessel without being dissipated by the reactor walls, thereby improving coating efficiency while minimizing energy loss

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

Elastic isolation elements serve as intermediaries between the vibration source and substrate vessel, and between the substrate vessel and reactor body. These intermediaries efficiently transmit required vibrations to the particles while blocking vibration transmission to the reactor structure, reducing energy loss

Inventive Principle:

Principle #24Intermediary (Mediator)

3Manufacturing precision

If precursor flow is not top-to-bottom, then reactor design is simpler, but coating uniformity deteriorates due to incomplete particle exposure

Engineering Contradiction:

Improvecoating uniformityVSAvoidprecursor flow system

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

Particle movement induced by vibration during top-to-bottom precursor flow ensures that all particle surfaces, including previously shadowed areas, are exposed to reactants. This combination achieves superior coating uniformity compared to conventional flow patterns

Inventive Principle:

Principle #18Mechanical vibration

Solution Approach 2:

Instead of rotating the substrate vessel or using complex multi-directional flow systems, the invention inverts the approach by keeping the flow direction simple (top-to-bottom) while making the particles move through vibration, achieving enhanced exposure and uniformity

Inventive Principle:

Principle #13The other way round (Inversion)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach results in a more uniform and efficient coating of particulate materials, preventing agglomeration and ensuring that all sides of the particles are coated uniformly, enhancing the quality and consistency of the deposited films.

Implementation Method 1

causing movements in the particulate material within the substrate vessel by the isolated vibration source while coating the particulate material

Methodology Applied

Scientific EffectVibration: Vibration

Implementation Method 2

coating particulate material within the substrate vessel by self-saturating surface reactions using a top-to-bottom precursor flow

Methodology Applied

Scientific EffectAtomic Layer Deposition: Deposition (physical)

Implementation Method 3

self-saturating surface reactions

Methodology Applied

Scientific EffectChemisorption: Chemisorption

Data Source

PatentUS11261526B2Particle coating

Publication Date: 2022.03.01 PICOSUN OY

AI summary

An atomic layer deposition (ALD) method in an ALD reactor including a reaction chamber housing a substrate vessel, and an isolated vibration source outside of the reaction chamber or isolated within the reaction chamber. Particulate material within the substrate vessel is coated by self-saturating surface reactions using a top-to-bottom precursor flow passing through the substrate vessel, and movements are caused in the particulate material within the substrate vessel by the isolated vibration source while coating the particulate material.