Atomic Layer Deposition Apparatus for Multi-Material Powder Coating
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Solution Overview
Problem
Existing atomic layer deposition apparatuses are limited to coating powder particles with a single material, lacking the capability to consecutively coat surfaces with different kinds of materials.
Innovation Solution
A coating apparatus featuring a rotating shaft with multiple reactors, each equipped with a first and second deposition part that can be detachably coupled to spray different source gases and perform exhausting, allowing for the sequential coating of powder particles with various materials.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a single-material coating apparatus is used, then the coating process is simple, but the apparatus cannot consecutively coat with different kinds of materials
Solution Approach 1:
The apparatus is divided into multiple independent reactors (first reactor, second reactor, etc.) that can be selectively activated. Each reactor can be configured with different source gas supply systems, allowing different materials to be deposited in different reactors simultaneously or sequentially, thus achieving multi-material coating capability while maintaining manageable system complexity through modular design
Solution Approach 2:
The apparatus is designed with a universal reactor platform that can accommodate different source gas supply systems and pumping parts. The reactors can be configured to handle various materials by simply changing the gas supply configuration, making the same physical apparatus capable of performing multiple coating functions without requiring completely separate equipment for each material
2Adaptability or versatility
If multiple reactors are used for sequential coating, then different materials can be coated, but the coating time increases
Solution Approach 1:
Multiple reactors are operated simultaneously in parallel, each depositing different materials onto different powder particle batches at the same time. This merging of multiple coating processes into a single time period dramatically reduces the total coating cycle time compared to sequential processing, while still enabling multi-material coating capability
Solution Approach 2:
The apparatus enables continuous coating operation by running multiple reactors simultaneously, ensuring that powder particles are continuously coated without idle time between material changes. The pumping parts and source gas supply systems are configured to maintain continuous flow and deposition processes across all active reactors, eliminating downtime associated with material switching
3Productivity
If source gases are sprayed continuously, then coating is efficient, but different reactive gases may mix in exhaust zones
Solution Approach 1:
The exhaust system is segmented into separate exhaust zones for each reactor, with dedicated exhaust paths that prevent mixing of different reactive gases. Each reactor has its own pumping part and exhaust channel, allowing continuous spraying and efficient coating while maintaining gas purity through physical separation of exhaust streams
Solution Approach 2:
The apparatus uses inert gas flow as an intermediary to separate and direct different reactive gases through separate exhaust paths. The inert gas acts as a carrier that prevents direct contact and mixing between different reactive species in the exhaust zones, maintaining coating purity while allowing continuous efficient deposition
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the simultaneous or sequential coating of powder particles with different materials, enhancing the durability and performance of particles by forming multiple layers using the atomic layer deposition method.
Implementation Method 1
a first supply part, which is provided to be detachably coupled to the reactor positioned at the first position in the outer chamber and sprays one or more kinds of source gases to the accommodation space to form a first deposition layer
Implementation Method 2
a second supply part, which is detachably coupled to the reactor positioned at the second position in the outer chamber and sprays one or more kinds of source gases to the accommodation space to form a second deposition layer
Implementation Method 3
a first pumping part which is detachably coupled to the reactor connected to the first supply part and performs exhausting on the accommodation space
Implementation Method 4
a second pumping part, which is detachably coupled to the reactor connected to the second supply part and performs exhausting on the accommodation space
Data Source
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AI summary
The present invention relates to a coating apparatus, and particularly, to an atomic layer deposition apparatus. According to the atomic layer deposition apparatus, surfaces of powder particles may be consecutively coated with different kinds of materials.