AlGaN Heterostructure with Si-Delta Doping for UV LED Conductivity

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Solution Overview

Problem

Conventional AlGaN UV light-emitting diodes face challenges in electrical conduction due to increasing donor and acceptor activation energies with Al-composition, leading to deficiencies in free electron and hole carriers, which affects the efficiency and reliability of UV light emission.

Innovation Solution

The design incorporates p-type doped AlGaN layers with strategically placed sheets of positive charge via Si-delta doping, optimizing the distance between charge sheets and Al-composition to enhance dopant activation and carrier confinement, resulting in improved conductivity and quantum confinement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If Al-composition in AlGaN layers is increased to improve UV emission wavelength, then emission wavelength is reduced (toward UVC), but donor and acceptor activation energies increase, leading to deficiency of free electron and hole carriers

Engineering Contradiction:
ImproveUV emission wavelengthVSAvoidelectrical conductivity
Core Design Contradiction:
Illumination intensityVSReliability

Solution Approach 1:

The patent applies parameter changes by systematically varying the Al-composition in AlGaN layers to optimize both emission wavelength and electrical conductivity. Specifically, the patent uses AlGaN layers with Al-composition ranging from 0.3 to 0.8, where higher Al-composition (0.6-0.8) is used in regions requiring higher conductivity (such as contact layers and blocking layers), while moderate Al-composition (0.3-0.5) is used in active regions for optimal UV emission. This graded parameter approach resolves the contradiction between wavelength optimization and conductivity maintenance.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs composite material structures by combining multiple AlGaN layers with different Al-compositions and doping types (n-type and p-type) to create a heterostructure. The device includes n-type AlGaN layers with Al-composition of 0.3-0.5 for active emission, p-type AlGaN layers with Al-composition of 0.6-0.8 for electron blocking and hole injection, and contact layers with optimized composition for low resistance. This composite approach allows each layer to be optimized for its specific function, resolving the conductivity-wavelength trade-off.

Inventive Principle:
Principle #40Composite materials

2Strength

If conventional p-type AlGaN layers are used with high Al-composition to improve electron-blockage, then electron blocking capability is enhanced, but hole injection and conductivity are reduced due to high acceptor activation energy

Engineering Contradiction:
Improveelectron blocking capabilityVSAvoidhole injection efficiency
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The patent applies local quality by creating regions with different Al-compositions and doping characteristics tailored to specific functional requirements. The p-type AlGaN layers have Al-composition of 0.6-0.8 specifically in regions where electron blocking is needed (such as the electron blocking layer adjacent to the n-type layer), while the composition is optimized in hole injection regions. This localized optimization allows high electron blocking capability without sacrificing hole injection efficiency, as each region has properties suited to its specific function.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the electrical conductivity and reliability of UV LEDs by increasing dopant activation and carrier accumulation, leading to improved light-emission efficiency and reduced electromigration of interstitial hydrogen, thus enhancing the overall performance of UV light-emitting devices.

Implementation Method 1

each of the one or more p-type doped AlGaN layers containing one or more sheets of positive charge inserted therein

Methodology Applied
Scientific EffectDelta doping:

Implementation Method 2

enhance dopant activation to improve electrical conductivity

Methodology Applied
Scientific EffectDopant activation: Dopants

Implementation Method 3

design rules for AlGaN heterostructures of improved conductivity and quantum confinement

Methodology Applied
Scientific EffectQuantum confinement:

Data Source

PatentUS10833221B2Heterostructure and light-emitting device employing the same
Publication Date: 2020.11.10 BOLB
  • US10833221B2 patent drawing
  • US10833221B2 patent drawing
  • US10833221B2 patent drawing

AI summary

Heterostructures containing one or more sheets of positive charge, or alternately stacked AlGaN barriers and AlGaN wells with specified thickness are provided. Also provided are multiple quantum well structures and p-type contacts. The heterostructures, the multiple quantum well structures and the p-type contacts can be used in light emitting devices and photodetectors.