AlGaN Intermediate Layer for Higher-Efficiency UV Quantum Wells

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Solution Overview

Problem

Current light-emitting diodes (LEDs) based on the AlGaN material system face challenges in efficiency, particularly in deep ultraviolet ranges, due to limitations in semiconductor layer structures and growth processes that affect the quality and performance of quantum well structures.

Innovation Solution

An optoelectronic semiconductor component is designed with a first semiconductor layer of AlxGa1-xN composition, a quantum well structure as an active zone, and an intermediate layer of AlyGa1-yN composition with varying aluminum content, which can form a superlattice structure, directly adjacent to the active zone, to enhance light emission efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If an intermediate layer of AlyGa1-yN composition with x*1.05≤y≤1 is introduced between the first semiconductor layer and the active zone, then the quality of the quantum well structure is improved and crystal defects are reduced, but the device structure becomes more complex

Engineering Contradiction:
Improvequality of quantum well structureVSAvoidstructure complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

An intermediate layer of AlyGa1-yN composition is introduced between the first AlxGa1-xN semiconductor layer and the active zone. This intermediate layer acts as a mediator that improves the quality of the quantum well structure and reduces crystal defects by providing a transition region with higher aluminum content (y≥x*1.05) that better matches the lattice structure and reduces dislocation propagation.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Productivity

If the intermediate layer is formed with high metal supersaturation, then the growth speed is increased, but the quality of the quantum well structure deteriorates

Engineering Contradiction:
Improvegrowth speedVSAvoidquality of quantum well structure
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The intermediate layer is formed with a degree of metal supersaturation that is at least 10% lower than that used for forming the first semiconductor layer. This partial action approach allows the intermediate layer to grow at a controlled rate that maintains high structural quality and reduces defects, while still achieving acceptable growth speeds for manufacturing.

Inventive Principle:
Principle #16Partial or excessive action

3Manufacturing precision

If the aluminum content of the intermediate layer is increased, then the lattice mismatch is reduced and crystal quality is improved, but the band gap increases and light emission efficiency decreases

Engineering Contradiction:
Improvecrystal qualityVSAvoidlight emission efficiency
Core Design Contradiction:
Manufacturing precisionVSLoss of energy

Solution Approach 1:

The intermediate layer uses a localized high aluminum content (y≥x*1.05) specifically at the interface region between the first semiconductor layer and the active zone, where it is most needed for reducing lattice mismatch and dislocation density. The aluminum content is not uniformly high throughout the entire device structure, but concentrated where it provides maximum benefit for crystal quality without excessive impact on overall light emission efficiency.

Inventive Principle:
Principle #3Local quality

Data Source

PatentUS12170342B2Optoelectronic semiconductor component having an intermediate layer and method for producing the optoelectronic semiconductor component
Publication Date: 2024.12.17 OSRAM OPTO SEMICON GMBH & CO OHG
  • US12170342B2 patent drawing
  • US12170342B2 patent drawing
  • US12170342B2 patent drawing

AI summary

In an embodiment an optoelectronic semiconductor component includes a first semiconductor layer of an n-conductivity type, the first semiconductor layer being of AlxGa1-xN composition, with 0.3≤x≤0.95, a second semiconductor layer of a p-conductivity type, an active zone between the first semiconductor layer and the second semiconductor layer, the active zone including a quantum well structure and an intermediate layer between the first semiconductor layer and the active zone, wherein the intermediate layer includes a semiconductor material of AlyGa1-yN composition, with x*1.05≤y≤1, and wherein the intermediate layer is located directly adjacent to the active zone.