Aligning Substrates of Different Sizes in Separate Spaces
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Solution Overview
Problem
Existing alignment technologies are limited in aligning substrates of different sizes and locations, as they require overlapping images in a single coordinate space, making it difficult to align substrates with unique sizes and shapes, particularly in high-tech industries like the touch panel industry.
Innovation Solution
A method involving capturing local images of substrates in different spaces, comparing specific marks or shapes, establishing actual coordinate systems, calculating offsets, and correcting coordinate values to align substrates of different sizes by simulating identical sizes, allowing for precise alignment without requiring complex transformation calculations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If overlapping-type alignment mark design is used in a single coordinate space, then alignment precision is improved, but it becomes inapplicable to substrates of different sizes in different waiting spaces
Solution Approach 1:
The patent divides the alignment process into two independent coordinate spaces: one for capturing images of alignment marks on substrates in the first waiting space, and another for capturing images of alignment marks on substrates in the second waiting space. This segmentation allows each coordinate space to be optimized independently, enabling precise alignment of substrates with different sizes without requiring a unified single-coordinate-space approach.
2Device complexity
If a single coordinate space is used for alignment, then calculation complexity is reduced, but substrates of different sizes cannot be aligned
Solution Approach 1:
The patent introduces a coordinate transformation mechanism as an intermediary between the two coordinate spaces. The processing unit transforms coordinates from the first coordinate space to the second coordinate space, enabling comparison and alignment of alignment marks on substrates of different sizes. This intermediary transformation layer allows the system to handle diverse substrate sizes while maintaining manageable calculation complexity through systematic coordinate mapping.
3Adaptability or versatility
If substrates of different sizes are aligned in different waiting spaces, then adaptability is improved, but coordinate system establishment and offset calculation become more complex
Solution Approach 1:
The patent establishes separate coordinate systems for the first and second waiting spaces in advance, before the actual alignment process. By pre-defining these coordinate spaces and their transformation relationships, the system simplifies the real-time alignment process. The coordinate systems are set up with predetermined origins and axes orientations, allowing for straightforward offset calculations when comparing alignment marks from different substrates.
Data Source
AI summary
A method for aligning substrates in different spaces and having different sizes includes: capturing actual local images of two substrates; comparing specific marks in standard local feature regions of the two substrates, and obtaining specific marks in actual local feature regions of the two substrates; separately establishing actual coordinate systems of the two substrates to synthesize aligned assembly coordinate system; comparing coordinate values of the specific marks of the two substrates in the two actual coordinate systems to obtain first group of offsets, and comparing sizes of the two substrates to obtain a size difference; using the first group of offsets and the size difference to correct coordinate values of specific marks of one of the two substrates; comparing coordinate values of the specific marks of the two substrates, to obtain second group of offsets; and moving the one to a position compensated by the second group of offsets.