Workpiece Aligner Chuck with Central Handling Element

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Solution Overview

Problem

Current edge/outer contact aligners require an additional internal lifting mechanism to handle workpieces with large openings, which increases complexity, cost, and particle generation during semiconductor manufacturing.

Innovation Solution

A workpiece aligner apparatus with a chuck design featuring edge gripping elements and a central handling element, along with a controller that manages the arm's position to prevent interference with a robot blade, allowing for center contact or edge/outer contact alignment without internal lifting mechanisms.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If an edge/outer contact aligner is used to support workpieces with large openings, then the aligner can accommodate shields with central openings, but an additional internal lifting mechanism is required which increases device complexity and particle generation

Engineering Contradiction:

Improveability to accommodate workpieces with central openingsVSAvoidinternal lifting mechanism

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The aligner chuck is divided into multiple independent gripping elements: a first edge gripping element, a second edge gripping element, and a central workpiece handling element. Each element can independently contact and hold different portions of the workpiece, allowing the system to handle both solid workpieces and those with central openings without requiring complex internal lifting mechanisms.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The aligner chuck design provides multi-functionality by incorporating both edge gripping elements and a central workpiece handling element in a single device. This universal design can accommodate various workpiece types (solid carriers, shields with openings, wafers) using the same aligner head, eliminating the need for different aligner types or additional lifting mechanisms.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Ease of manufacture

If a center contact aligner is used, then the aligner can process solid substrates and carrier bases, but it cannot accommodate shields with large central openings

Engineering Contradiction:

Improvesimplicity of aligner designVSAvoidability to handle diverse workpiece types

Core Design Contradiction:

Ease of manufactureVSAdaptability or versatility

Solution Approach 1:

The aligner chuck is segmented into multiple independent gripping elements: a first edge gripping element, a second edge gripping element, and a central workpiece handling element. This segmentation allows each element to independently contact and hold different portions of various workpiece types, enabling the single aligner design to accommodate both solid workpieces and those with central openings.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The aligner chuck provides universal functionality by integrating both edge gripping elements and a central workpiece handling element. This multi-functional design allows the same aligner head to process diverse workpiece types including solid carriers, shields with openings, and wafers, thereby improving adaptability while maintaining manufacturing simplicity.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Ease of operation

If edge/outer contact aligner with lift pins is used, then workpieces can be lifted off the aligner arm for removal, but particles are generated and complexity increases

Engineering Contradiction:

Improveworkpiece removal capabilityVSAvoidparticle generation

Core Design Contradiction:

Ease of operationVSObject-generated harmful factors

Solution Approach 1:

The harmful internal lifting mechanism (lift pins) is extracted and replaced with an external robot blade system. The robot blade, positioned outside the aligner chuck, performs the lifting and removal function without contacting the workpiece through internal pins, thereby eliminating particle generation from the lifting mechanism while maintaining ease of operation.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The robot blade acts as an intermediary between the workpiece and the external handling system. Instead of using internal lift pins that directly contact and potentially contaminate the workpiece, the robot blade mediates the lifting process from an external position, reducing particle generation while enabling easy workpiece removal.

Inventive Principle:

Principle #24Intermediary (Mediator)

Data Source

PatentUS10522381B2Aligner apparatus and methods

Publication Date: 2019.12.31 APPLIED MATERIALS INC

AI summary

Described herein are aligners and methods of aligning workpieces. A workpiece aligner apparatus comprises an aligner chuck including an arm having a first end and a second end, a first edge gripping element on the first end and a second edge gripping element on the second end, the first edge gripping element and the second edge gripping element spaced apart to hold a workpiece at edges thereof, and a central workpiece handling element located in a central region of the arm, wherein the central workpiece handling element has a height such that the central workpiece handling element extends higher than the first edge gripping element and second edge gripping element.