Aligner Station Calibration for Accurate Substrate Orientation
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Solution Overview
Problem
Electronics processing systems face errors in substrate orientation and positioning due to misalignments and misadjustments in aligner stations and processing chambers, leading to inaccuracies and increased system latency.
Innovation Solution
A method involving a calibration object is used to determine characteristic error values by placing it at a target orientation in a processing chamber, retrieving it, and aligning it at an aligner station, allowing for the correction of these errors by adjusting the target orientation based on the determined error values, which are then stored for future alignments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the aligner station and processing chamber are installed and operated without calibration, then the system can function with basic capability, but the substrate orientation and positioning accuracy deteriorates due to accumulated errors
Solution Approach 1:
The patent implements preliminary calibration actions by placing a calibration object in the processing chamber before normal substrate processing. The system captures images of the calibration object at known positions and orientations, then uses these reference measurements to determine and store characteristic error values for the aligner station and processing chamber. This preliminary calibration establishes a baseline that compensates for installation and operational errors throughout subsequent processing.
Solution Approach 2:
The patent uses a calibration object that replicates the physical and optical characteristics of actual substrates. By capturing images of this calibration object at precisely known positions and orientations using the same cameras and lighting systems used for substrate processing, the system creates a reference copy that enables error characterization without requiring complex external measurement equipment.
2Manufacturing precision
If multiple alignment operations are performed to correct positioning errors, then the substrate positioning accuracy improves, but the system latency and processing time increases
Solution Approach 1:
The system performs preliminary calibration to determine characteristic error values before normal processing begins. These error values are stored and automatically applied to calculate corrected target positions and orientations for substrates. By pre-characterizing the system errors, the patent eliminates the need for iterative alignment adjustments during substrate processing, achieving high positioning accuracy in a single operation.
Solution Approach 2:
The patent implements a feedback mechanism where the measured position and orientation of the calibration object are compared against known reference values. The difference between measured and expected positions reveals the characteristic errors of the aligner station and processing chamber. This feedback information is then used to compensate for errors in subsequent substrate positioning, correcting systematic deviations without requiring multiple trial alignments.
3Manufacturing precision
If the aligner station operates without error compensation, then the system operation is simple, but the substrate placement accuracy at the processing chamber deteriorates
Solution Approach 1:
The system performs self-calibration by automatically capturing images of the calibration object, processing the image data to determine characteristic error values, and storing these values for use in substrate positioning. The calibration process is integrated into the normal system operation, requiring minimal external intervention or manual adjustment. The system essentially calibrates itself using its own imaging and positioning systems, maintaining simplicity while achieving high accuracy.
4Manufacturing precision
If characteristic error values are determined and stored for compensation, then the substrate orientation accuracy improves, but the system complexity and calibration time increases
Solution Approach 1:
The patent uses a calibration object that is a simplified replica of the actual substrate, with known geometric features that can be easily imaged and measured. By using this calibration copy instead of complex reference standards or external measurement equipment, the system determines characteristic error values through straightforward image processing. The calibration object's simple, well-defined features make it easy to capture and analyze, reducing the complexity of the calibration system while maintaining high measurement accuracy.
Data Source
AI summary
A calibration object is retrieved, by a first robot arm of a transfer chamber, from a processing chamber connected to the transfer chamber and placed in a load lock connected to the transfer chamber. The calibration object is retrieved from the load lock by a second robot arm of a factory interface connected to the load lock and placed at an aligner station housed in or connected to the factory interface. The calibration object has a first orientation at the aligner station. A difference is determined between the first orientation and an initial target orientation at the aligner station. A first characteristic error value associated with the processing chamber is determined based on the determined difference. The first characteristic error value is recorded in a storage medium. The aligner station is to use the first characteristic error value for alignment of objects to be placed in the processing chamber.