Alignment Adjuster Thermal Expansion Stabilization

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Solution Overview

Problem

Semiconductor exposure apparatuses face challenges in maintaining resolution due to chromatic aberrations caused by wide spectral linewidths of KrF and ArF excimer laser light, which are exacerbated by thermal expansion differences between materials used in alignment adjusters, leading to unintended changes in the posture of optical elements.

Innovation Solution

The alignment adjuster employs expandable/contractable sections made of materials with a lower coefficient of thermal expansion, such as stainless steel, to stabilize the position and orientation of optical elements by adjusting their length and contact points within specific planes, ensuring consistent thermal expansion and minimizing aberrations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If expandable/contractable sections made of materials with different thermal expansion coefficients are used in the alignment adjuster, then the device can adjust the position and orientation of optical elements, but thermal expansion differences cause unintended changes in the posture of optical elements

Engineering Contradiction:

Improveadjustability of optical element positionVSAvoidposture stability of optical element

Core Design Contradiction:

Ease of operationVSStability of the object's composition

Solution Approach 1:

The patent applies thermal expansion by making the expandable/contractable section and support member from different materials (first and second materials) with different thermal expansion coefficients. The expandable/contractable section utilizes controlled thermal expansion to adjust the position and orientation of the optical element, while the support member's thermal expansion characteristics are considered in the design to manage overall structural stability during temperature variations.

Inventive Principle:

Principle #37Thermal expansion

Solution Approach 2:

The patent employs composite materials by combining two different materials with distinct thermal expansion properties in the alignment adjuster structure. The first material (for expandable/contractable section) and second material (for support member) are selected and configured to work together, where their different thermal expansion characteristics are leveraged to achieve both adjustability and controlled stability in the optical element positioning system.

Inventive Principle:

Principle #40Composite materials

2Ease of operation

If materials with different thermal expansion coefficients are used for support members and expandable/contractable sections, then adjustability is achieved, but chromatic aberrations increase due to unintended posture changes

Engineering Contradiction:

Improveadjustability of optical elementVSAvoidresolution of projection lens

Core Design Contradiction:

Ease of operationVSManufacturing precision

Solution Approach 1:

The patent utilizes thermal expansion of the expandable/contractable section made from the first material to enable adjustment of the optical element's position and orientation. Simultaneously, the support member made from the second material with different thermal expansion characteristics provides a stable reference framework, and the design accounts for the differential expansion to prevent unintended posture changes that would cause chromatic aberrations.

Inventive Principle:

Principle #37Thermal expansion

Solution Approach 2:

The patent uses composite materials with different thermal expansion coefficients to create an alignment adjuster that balances adjustability and precision. The first material (expandable/contractable section) enables positioning adjustments, while the second material (support member) maintains structural integrity and minimizes thermal distortion, thereby preventing chromatic aberrations in the projection lens while preserving adjustment capability.

Inventive Principle:

Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution effectively stabilizes the posture of optical elements, reducing chromatic aberrations and maintaining resolution by synchronizing the thermal expansion of support members and expandable/contractable sections, thus enhancing the performance of semiconductor exposure apparatuses.

Implementation Method 1

a first adjuster including a first expandable/contractable section made of a second material different from the first material and configured to rotate the first holder and the optical element around a first axis by adjusting a length of the first expandable/contractable section

Methodology Applied

Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentUS20230066377A1Alignment adjuster and method for manufacturing electronic devices

Publication Date: 2023.03.02 GIGAPHOTON INC

AI summary

An alignment adjuster includes a first holder made of a first material and configured to support an optical element, a first adjuster including a first expandable/contractable section made of a second material different from the first material and configured to rotate the first holder and the optical element around a first axis by adjusting the length of the first expandable/contractable section with the first expandable/contractable section being in contact with the first holder, and a first support member made of the second material and configured to support the first adjuster, and the first adjuster is configured to be capable of adjusting the position where the first expandable/contractable section and the first holder are in contact with each other to be located in a first plane containing a first end section of the first support member and the first axis.