Alignment Jig Position Correction Using Susceptor Pin
Solution Overview
Problem
Conventional methods for teaching a transportation position and alignment jig in substrate processing require opening the chamber to the atmosphere, leading to prolonged operation times due to temperature and vacuum fluctuations, and rely on visual confirmation which can result in misalignment between the chamber and susceptor centers.
Innovation Solution
A method involving a sensor-detecting alignment jig with sloping surfaces that is moved by a robot hand to correct its position relative to a susceptor pin, allowing for accurate positioning without opening the chamber, using the susceptor pin's weight to slide on the sloping surfaces and adjust the movement destination information based on initial and corrected positions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the chamber is opened to the atmosphere for conventional teaching, then alignment can be visually confirmed, but operation time is prolonged due to temperature and vacuum fluctuations
Solution Approach 1:
The patent replaces visual confirmation (optical method) with a mechanical sensing system. A sensor detects the position of the alignment jig, and a robot hand mechanically adjusts the jig's position based on detected deviations. This substitution eliminates the need to open the chamber for visual alignment while maintaining precise alignment capability through automated sensor-based detection and mechanical correction.
2Ease of operation
If the chamber is opened to the atmosphere for conventional teaching, then alignment can be performed, but temperature and vacuum conditions must be changed, extending operation time
Solution Approach 1:
The system performs self-alignment without external intervention. The sensor automatically detects the alignment jig's position, the controller calculates the deviation from the center, and the robot hand autonomously adjusts the jig's position. This self-service capability allows alignment to be performed while the chamber maintains its operating conditions, eliminating the time-consuming process of opening and re-establishing vacuum and temperature conditions.
3Device complexity
If visual confirmation is used for alignment, then the process is simple, but misalignment between chamber and susceptor centers may occur
Solution Approach 1:
The patent replaces subjective visual confirmation with objective mechanical-sensor-based detection. The sensor precisely measures the alignment jig's position relative to the chamber center, and the robot hand makes exact mechanical adjustments based on quantified deviation data. This objective measurement and control system eliminates human error in visual alignment while maintaining operational simplicity through automated feedback control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces operation time by allowing teaching to occur within the chamber's operating state, maintaining temperature and vacuum conditions, and ensures precise alignment without visual confirmation, enabling immediate substrate processing.
Implementation Method 1
correcting the position of the alignment jig relative to a susceptor pin projecting upwards from an upper surface of the susceptor by lowering the robot hand to bring one of the sloping surfaces into contact with the susceptor pin and causing the susceptor pin to slide on the sloping surface by virtue of an own weight of the aliment jig
Data Source
AI summary
Examples of a method for teaching a transportation position includes correcting the position of an alignment jig having a plurality of sloping surfaces relative to a susceptor pin projecting upwards from an upper surface of a susceptor by lowering a robot hand to bring one of the sloping surfaces into contact with the susceptor pin and causing the susceptor pin to slide on the sloping surfaces by virtue of an own weight of the aliment jig, detecting a position of the alignment jig before and after the positional correction of the alignment jig, and correcting a movement destination information by an amount corresponding to a difference between an initial position and a corrected position of the alignment jig.