Semiconductor Alignment Mark Hollow Pattern
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Solution Overview
Problem
Conventional semiconductor devices require a reserved region for alignment marks, limiting circuit layout and increasing costs due to unused space.
Innovation Solution
Incorporating hollow patterns in alignment marks on the semiconductor device's substrate, allowing traces to pass through and enhancing identification rates by creating sharper optical variations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a reserved region is allocated for the alignment mark in conventional semiconductor devices, then the alignment mark can be properly positioned, but the circuit layout is limited and the device cost increases due to unused space
Solution Approach 1:
The alignment mark incorporates hollow patterns (porous structure) that allow light to pass through, creating sharper optical variations for better identification. The hollow patterns consist of multiple sub hollow patterns with spaces that enhance optical contrast while allowing the region to be reused for circuit traces
Solution Approach 2:
The region containing the alignment mark serves dual purposes: it maintains alignment functionality while also being usable for circuit traces. The hollow patterns enable the alignment mark to be identified optically while allowing trace signals to pass through the same region, eliminating the need for dedicated reserved space
2Measurement precision
If a reserved region is allocated for the alignment mark, then proper alignment is achieved, but the device cost increases due to reduced effective area
Solution Approach 1:
The alignment mark region is merged with the circuit region, allowing both alignment functionality and circuit functionality to coexist in the same physical space. The hollow patterns enable this merging by providing optical contrast for alignment while allowing electrical traces to be routed through the same area
Solution Approach 2:
The hollow patterns create a porous structure in the alignment mark that allows optical penetration for identification while permitting the region to be reused for circuit traces, thereby reducing the total device area required and lowering manufacturing costs
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The hollow patterns improve alignment mark identification rates, enabling the use of reserved regions for circuit traces and reducing semiconductor device costs.
Implementation Method 1
the hollow pattern causes the optical variation of the alignment mark is sharper
Data Source
AI summary
A semiconductor device including a substrate and at least one alignment mark disposed on the substrate and having at least one hollow pattern. Therefore, the identification rate of the alignment mark can be high by the hollow pattern.