Compact Alignment Stage with Integrated Thrust Mechanisms
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Solution Overview
Problem
Conventional alignment stages are bulky due to the layering of separate thrust generation sources for X, Y, and θ directions, and have complex installation requirements for actuator modules.
Innovation Solution
A compact alignment stage design featuring X and Y direction thrust generation guide mechanisms with linear motors and guides, allowing for movement in straight lines X and Y, and rotation θ, with a simplified configuration that reduces size and assembly complexity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If separate thrust generation sources are layered for X, Y, and θ directions, then positioning capability in multiple directions is achieved, but the overall stage size becomes larger
Solution Approach 1:
The patent combines multiple thrust generation sources into a shared common base structure. The X-direction actuator, Y-direction actuator, and θ-direction actuator are integrated onto a common base plate rather than being layered separately, reducing the overall stage volume while maintaining multi-directional positioning capability
Solution Approach 2:
The common base plate serves multiple functions: it supports all three actuator modules, provides a reference plane for positioning, and enables coordinated movement in X, Y, and θ directions. This multi-functional design eliminates the need for separate structural elements for each degree of freedom
2Adaptability or versatility
If three actuator modules are mounted on the same plane, then multi-directional movement is achieved, but installation requires accurate positioning and mutual balancing
Solution Approach 1:
The system is divided into three independent actuator modules (X-direction, Y-direction, and θ-direction) that can be manufactured and positioned separately. Each module is designed as an independent unit that can be installed on the common base plate without requiring complex mutual balancing, simplifying the assembly process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design achieves downsizing and simplifies assembly by integrating thrust generation mechanisms, enabling smooth movement and rotation while maintaining precise positioning capabilities.
Implementation Method 1
using a linear driving source, such as a linear motor, as a driving force source
Data Source
AI summary
An alignment stage including: a base plate; one or more X direction thrust generation guide mechanisms for generating thrust and performing guidance in the direction of a straight line X; a pair of lower plates disposed above the X direction thrust generation guide mechanisms; a pair of upper plates provided corresponding to the lower plates, respectively; a pair of rotatable bearings disposed between the lower plates and the upper plates; one or more Y direction thrust generation guide mechanisms for generating thrust and performing guidance in the direction of a straight line Y perpendicular to the straight line X; and a table plate disposed above the Y direction thrust generation guide mechanisms. With this configuration, it is possible for the alignment stage to be compact and easy to assemble.