Alkaline-Resistant Insulator Layer for Transistor Substrate Protection

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Solution Overview

Problem

Existing laminates using organic insulators face challenges in patterning the insulator layer without dissolving or swelling the resin substrate, particularly when using alkaline developers, which limits the materials available for forming insulator layers.

Innovation Solution

A composition comprising an organic compound with a hydroxy group, specific organic silicon compounds with cyclic ether groups, and a photocationic polymerization initiator, allowing for the formation of an insulator layer using an alkaline solution through cationic polymerization, enabling the manufacturing of laminates and transistors with improved insulation properties.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If an alkaline solution is used as a developer to prevent resin substrate dissolution or swelling, then substrate integrity is improved, but the material selection for insulator layers becomes limited

Engineering Contradiction:
Improvesubstrate integrityVSAvoidmaterial selection
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The patent changes the chemical parameters of the insulator layer material by introducing a curable composition that reacts with alkaline developers. The composition contains functional groups (carboxylic acid, hydroxyl, amino) that react with alkaline solutions to form insoluble cross-linked structures, transforming the material from alkaline-soluble to alkaline-resistant while maintaining developability through controlled curing

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent creates a composite material system combining the curable composition with alkaline developer components. The insulator layer becomes a composite structure where the polymer matrix is cross-linked with alkaline developer byproducts, creating a material that simultaneously achieves substrate protection and maintains patterning capability

Inventive Principle:
Principle #40Composite materials

2Ease of manufacture

If a conventional insulator layer material is used that can be patterned with alkaline developer, then ease of manufacturing is improved, but the resin substrate may be dissolved or swelled

Engineering Contradiction:
Improvepatterning processVSAvoidsubstrate dissolution
Core Design Contradiction:
Ease of manufactureVSObject-affected harmful factors

Solution Approach 1:

The patent applies preliminary action by forming the insulator layer from a curable composition before the alkaline developer is applied. The composition is cured in advance to create an alkaline-resistant structure, so when the alkaline developer is subsequently applied for patterning, the substrate is already protected from dissolution

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The curable composition acts as an intermediary between the resin substrate and the alkaline developer. It provides a protective barrier that prevents direct contact between the alkaline solution and the substrate, while still allowing the developer to pattern the insulator layer through controlled chemical reactions

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution allows for the formation of insulator layers using alkaline solutions, reducing manufacturing complexity and preventing substrate damage, while providing high dielectric constants and improved insulation properties, thus enhancing the performance of electronic devices.

Implementation Method 1

a photocationic polymerization initiator

Methodology Applied
Scientific EffectPhotocationic polymerization: Photopolymerisation

Data Source

PatentUS10510460B2Composition, laminate, method of manufacturing laminate, transistor, and method of manufacturing transistor
Publication Date: 2019.12.17 NIKON CORP
  • US10510460B2 patent drawing
  • US10510460B2 patent drawing
  • US10510460B2 patent drawing

AI summary

A method of manufacturing a laminate, transistor, and method of manufacturing transistor using a composition that includes an organic compound having a hydroxy group; a first cross-linking agent that is at least one organic silicon compound selected from the group including an organic silicon compound including a siloxane bond in the molecule and having three or more cyclic ether groups in the molecule, a chain organic silicon compound including two or more siloxane bonds in the molecule and having two or more cyclic ether groups in the molecule, a cyclic organic silicon compound including D unit in the molecule and having four or more cyclic ether groups bonded to a silicon atom of the D unit in the molecule, and a cyclic organic silicon compound including a T unit in the molecule and having two or more cyclic ether groups in the molecule; and a photocationic polymerization initiator.