Alkoxysilane Diffusing Agent Composition for Solar Wafer Coating
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Solution Overview
Problem
Conventional paintable diffusing agents used in semiconductor substrates with steps or level differences, such as silicon wafers for solar cells, tend to leave residual liquid in concaves, leading to cracking when heated, and result in insufficient film thickness on slope regions.
Innovation Solution
A diffusing agent composition containing a condensation product made from alkoxysilane, an impurity diffusion component, and an organic solvent, which is suitable for ink-jet patterning, ensuring a sufficient film thickness without cracking when applied to substrates with steps and heated.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the painting liquid is made into a thin film to avoid cracking, then cracking is prevented, but the film thickness on the shoulder region becomes insufficient
Solution Approach 1:
The patent changes the chemical composition parameters of the painting liquid by adding specific organic solvents (ethylene glycol monomethyl ether, ethylene glycol monobutyl ether) with controlled boiling points and viscosities. This parameter adjustment allows the liquid to maintain appropriate flow characteristics during application and drying, enabling sufficient film thickness on shoulder regions while preventing cracking during firing.
Solution Approach 2:
The patent creates a composite painting liquid composition by combining the diffusing agent with multiple organic solvents having different properties (boiling points, viscosities, polarities). This composite formulation allows the liquid to exhibit optimized rheological behavior during the painting and drying processes, achieving both adequate film thickness and crack resistance simultaneously.
2Reliability
If the painting liquid concentration is made low to avoid cracking, then cracking is prevented, but the film thickness becomes insufficient
Solution Approach 1:
The patent adjusts the concentration parameters of the diffusing agent in the painting liquid and compensates by optimizing the solvent system. The specific combination of organic solvents with controlled evaporation rates allows the liquid to remain fluid enough for adequate coverage at lower concentrations, yet provides sufficient material for forming a thick enough film on shoulder regions after drying.
Solution Approach 2:
The organic solvents act as intermediaries that mediate between the diffusing agent and the substrate. These solvents provide controlled evaporation during drying, allowing the diffusing agent to distribute evenly and form sufficient film thickness on shoulder regions without causing cracking, even at optimized (not excessively high) concentrations.
3Manufacturing precision
If the painting liquid remains in concaves to maintain film thickness, then film thickness is sufficient, but cracking occurs during firing
Solution Approach 1:
The patent modifies the viscosity and surface tension parameters of the painting liquid through the selection of specific organic solvents. These parameter changes allow the liquid to drain more effectively from concave regions during application, reducing excess accumulation that would lead to cracking, while still maintaining sufficient film thickness on shoulder regions through controlled evaporation.
Solution Approach 2:
The patent creates a dynamic painting liquid system where the viscosity and evaporation rate change over time during the drying process. The organic solvents provide initial fluidity for even distribution and drainage from concaves, then progressively evaporate to leave sufficient film thickness, creating a time-dependent optimization that prevents both cracking and thickness deficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The composition achieves a sufficient film thickness and prevents cracking on substrates with steps, enhancing the reliability of semiconductor substrate processing.
Implementation Method 1
a condensation product (A) made from a starting material that is an alkoxysilane represented by the following general formula (1)
Implementation Method 2
a condensation product (A) made from a starting material that is an alkoxysilane represented by the following general formula (1)
Implementation Method 3
causing the N-type impurity diffusion component to diffuse from the applied diffusing agent
Data Source
AI summary
A diffusing agent composition of an aspect of the invention contains: a condensation product (A) made from a starting material that is an alkoxysilane represented by the following general formula (1):[Chemical Formula 1]R1mSi(OR2)4-m (1)where R1 and R2 are an organic group,a plurality of R1s and R2s included in condensation product are identical or different, and m is 0, 1 or 2,the condensation product including an alkoxysilane where m=0 also including at least one alkoxysilane where m is 1 or 2; an impurity diffusion component (C); and an organic solvent (D).