Alkyl Indium Sesquichloride Synthesis via Ionic Liquid Medium

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Solution Overview

Problem

Current processes for preparing indium-containing precursors for MOCVD face challenges such as low yield, selectivity, and purity, along with environmental concerns and high costs, particularly due to the use of organic solvents and complex reaction steps, which impede the production of high-quality semiconductor layers.

Innovation Solution

A process for preparing alkyl indium sesquichloride with high yield and purity, avoiding organic solvents and involving a reaction between indium and an alkyl chloride, allowing for the production of indium-containing precursors suitable for MOCVD, with a focus on cost-effectiveness and environmental sustainability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional processes using organic solvents and complex reaction steps are used, then indium-containing precursors can be prepared, but the yield, selectivity, and purity are low, and environmental impact and costs are high

Engineering Contradiction:
ImprovepurityVSAvoidenvironmental impact
Core Design Contradiction:
Manufacturing precisionVSObject-generated harmful factors

Solution Approach 1:

The patent changes the chemical parameters of the reaction system by replacing organic solvents with an ionic liquid medium and modifying the reaction conditions (temperature, pressure, catalysts) to achieve high purity indium-containing precursors without organic solvent residues, thereby resolving the contradiction between manufacturing precision and environmental harm

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses ionic liquids as an inert reaction medium that prevents unwanted side reactions and solvent contamination, providing a clean reaction environment that achieves high purity products while avoiding the environmental problems associated with volatile organic solvents

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

2Quantity of substance

If conventional processes with multiple reaction steps are used, then indium-containing precursors can be prepared, but the process is time-consuming and costly

Engineering Contradiction:
ImproveyieldVSAvoidprocess duration
Core Design Contradiction:
Quantity of substanceVSLoss of time

Solution Approach 1:

The patent combines multiple reaction steps into a streamlined process by using ionic liquids that enable direct synthesis and simplify work-up procedures, reducing the overall process time while maintaining or improving yield through enhanced reaction efficiency and selectivity

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The ionic liquid medium provides self-cleaning properties where the product can be easily separated from the reaction medium through simple filtration or decantation, and the ionic liquid can be reused, thereby reducing process time and eliminating the need for extensive purification steps

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The process achieves high yield and purity of alkyl indium sesquichloride, enabling the production of indium-containing precursors with improved semiconductor layer quality, reducing environmental impact and production costs, and facilitating efficient MOCVD processes.

Implementation Method 1

reacting indium with an alkyl donor to form compound (A), wherein the alkyl donor is an alkyl chloride (RCl)

Methodology Applied
Scientific EffectChemical reaction: Chemical Bonding

Data Source

PatentEP3256478B1Process for preparing alkyl-indium compounds and the use thereof
Publication Date: 2020.10.28 UMICORE AG & CO KG
  • EP3256478B1 patent drawing

AI summary

The invention relates to a process for the cost-effective and environmentally responsible preparation of alkyl indium sesquichloride in high yield and with high selectivity and purity. The alkyl indium sesquichloride prepared in accordance with the invention is particularly suitable, also as a result of its high purity and yield, for preparation of indium-containing precursors in accordance with demand, in high yield and with high selectivity and purity. As a result of the high purity, the indium-containing precursors that are preparable are particularly suitable for metal-organic chemical vapor deposition (MOCVD) or metal-organic vapor phase epitaxy (MOVPE). The novel process according to the invention is characterized by the improved execution of the process, in particular by rapid process control. Owing to targeted and extensive use of raw materials that are inexpensive and have a low level of environmental pollution, the process is also suitable for use on an industrial scale.