All-Fiber Laser Interference Lithography Setup
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Solution Overview
Problem
Existing laser interference lithography systems face challenges with extensive realignment requirements for pattern changes and susceptibility to environmental disturbances like airflow and vibrations, leading to suboptimal interference patterns.
Innovation Solution
An all-fiber laser interference lithography system using optical fiber beam-splitters for beam splitting and delivery, with phase compensation mechanisms to adjust and stabilize the interference patterns, allowing for flexible realignment and reduced environmental impact.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If glass beam-splitters are used to split laser beams in free space, then beam splitting can be achieved, but extensive time is required for alignment and the system is susceptible to environmental disturbances
Solution Approach 1:
The patent replaces the mechanical free-space optical system with an all-fiber optical system. Fiber optic cables substitute for free-space beam propagation, eliminating the need for mechanical alignment of beam-splitters and mirrors. The fiber-based system inherently protects against environmental disturbances like airflow and vibrations, while the plug-and-play fiber connectors enable rapid reconfiguration without time-consuming realignment.
Solution Approach 2:
The patent introduces fiber optic cables as intermediary elements between the laser source and the interference pattern generation point. These fiber cables act as mediators that transmit light while isolating the optical path from environmental disturbances. The fiber-based transmission medium protects the coherent light beams from airflow and vibrations that would otherwise affect free-space propagation.
2Adaptability or versatility
If the interference pattern period is altered by realigning optical components, then pattern periods can be changed, but the process is very time-consuming and challenging
Solution Approach 1:
The patent implements a dynamic, reconfigurable fiber optic system where the relative positions and angles of fiber output ends can be easily adjusted. This dynamic configuration allows rapid change of interference pattern periods by simply repositioning fiber connectors or adjusting fiber angles, eliminating the time-consuming realignment of multiple optical components required in traditional systems.
Solution Approach 2:
The patent segments the optical system into independent fiber optic modules that can be individually adjusted. Each fiber cable can be independently positioned and angled at its output end, allowing selective adjustment of beam parameters without affecting other parts of the system. This modular segmentation enables rapid pattern period changes through simple local adjustments rather than system-wide realignment.
3Ease of manufacture
If discrete optical components are used to deliver and split light, then beam splitting can be achieved, but the system is susceptible to environmental disturbances such as air flow or vibrations
Solution Approach 1:
The patent replaces discrete mechanical optical components (beam-splitters, mirrors, lenses mounted on optical benches) with an integrated fiber optic system. The fiber cables inherently protect the light transmission path from environmental disturbances while maintaining ease of assembly through standard fiber connector interfaces. The flexible fiber optic structure eliminates the need for rigid mechanical mounting and alignment of multiple discrete components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables rapid and precise alteration of interference patterns with improved stability against environmental disturbances, enhancing the quality and efficiency of large-area nanostructure fabrication.
Implementation Method 1
When a coherent laser beam is split into two or more beams that overlap within a certain area, there will be gratings or grids of regular light intensity patterns formed. These interference patterns, created by the split beam or beams, expose the photoresist
Implementation Method 2
an all-fiber laser interference lithography system using an optical fiber beam-splitter
Data Source
AI summary
A laser interference lithography device using all-fiber-optic components is disclosed. In the said all-fiber laser interference lithography device, an input coupling fiber receives the coherent laser beam from a laser source and sends it to an optical fiber splitter. The optical fiber splitter splits the input laser beam into at least two sub-beams and outputs the multiple sub-beams through multiple output optical fiber. Adjustable fiber holders, each carrying one output fiber, tune the position and angle of output optical fibers to achieve desired interference patterns on a substrate.