Aluminum Nitride Sample Holder Composition for Low-Polarization Chucking
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Solution Overview
Problem
Existing sample holders made of aluminum nitride sintered bodies face challenges in maintaining high volume resistivity and efficient charge transfer, leading to issues with polarization and detachment of samples during electrostatic chucking processes.
Innovation Solution
Incorporating aluminum oxynitride particles with solid-solved titanium into the aluminum nitride substrate, which increases volume resistivity by electrostatically pinning aluminum vacancies at grain boundaries, enhancing charge compensation and reducing polarization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If aluminum nitride sintered bodies are used as sample holders, then high strength and thermal conductivity are achieved, but volume resistivity decreases leading to polarization issues
Solution Approach 1:
The invention uses a composite material system consisting of aluminum nitride particles as the base matrix and aluminum oxynitride particles dispersed within it. This composite structure combines the high strength and thermal conductivity of aluminum nitride with the high volume resistivity of aluminum oxynitride, achieving both mechanical performance and electrical insulation requirements simultaneously
Solution Approach 2:
The invention applies local quality enhancement by concentrating aluminum oxynitride particles at the grain boundaries between aluminum nitride particles. This localized distribution targets the specific regions where charge transfer occurs during electrostatic chucking, providing high volume resistivity exactly where needed without compromising the overall structural integrity
2Ease of operation
If aluminum nitride substrate is used for electrostatic chucking, then sample holding is achieved, but charge transfer efficiency decreases due to polarization
Solution Approach 1:
The composite material structure with aluminum oxynitride particles dispersed in the aluminum nitride matrix provides localized high volume resistivity regions that prevent charge accumulation and polarization, enabling efficient charge transfer while maintaining electrostatic holding capability
Solution Approach 2:
By positioning aluminum oxynitride particles specifically at grain boundaries, the invention creates localized zones of high volume resistivity that directly address the charge transfer interface during electrostatic chucking, improving charge transfer efficiency without affecting sample holding performance
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly increases the volume resistivity of the substrate, improving charge transfer efficiency and facilitating easy detachment of samples by reducing polarization after voltage application.
Implementation Method 1
Incorporating aluminum oxynitride particles with solid-solved titanium into the aluminum nitride substrate, which increases volume resistivity by electrostatically pinning aluminum vacancies at grain boundaries
Data Source
AI summary
A sample holder of the present disclosure includes an aluminum nitride substrate and an internal electrode provided on the aluminum nitride substrate. The aluminum nitride substrate includes a plurality of aluminum nitride particles and aluminum oxynitride particles located in crystal grain boundaries of the plurality of aluminum nitride particles. Titanium is solid-solved in the aluminum oxynitride particles.