AlN Susceptor Joining via Transient Liquid Phase Sintering
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Solution Overview
Problem
The existing susceptor designs in microelectronics manufacturing face challenges such as limited wire accommodation due to geometric constraints, structural disuniformities from non-uniform shrinkage, and corrosion from harsh processing gases, which affect thermal uniformity and the longevity of components like tungsten.
Innovation Solution
The introduction of a transient liquid phase promoting additive, such as rare earth oxides, is used between ceramic components to facilitate a hermetic ceramic weld during firing, ensuring uniform bonding and preventing oxidation of tungsten by maintaining a controlled atmosphere and applying pressure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If conventional susceptor designs are used with limited wire accommodation, then geometric constraints are satisfied, but electrical interconnection capability is reduced
Solution Approach 1:
The patent transitions from planar wire arrangements to three-dimensional embedded conductive pathways within the ceramic layers, allowing wires to be routed through multiple dimensions and levels, thereby increasing accommodation capability without violating external geometric constraints
Solution Approach 2:
The patent implements nested conductive structures where multiple wire pathways are embedded within hierarchical layers of ceramic material, with inner layers containing additional conductive elements, enabling high-density interconnection within compact geometries
2Strength
If ceramic components are joined without transient liquid phase additives, then manufacturing simplicity is maintained, but bonding strength and hermeticity are insufficient
Solution Approach 1:
The patent modifies the chemical composition parameters of the ceramic bonding interface by incorporating transient liquid phase additives, which undergo phase transitions during sintering to form strong hermetic bonds, thereby achieving enhanced joint strength through controlled compositional changes
Solution Approach 2:
The patent utilizes phase transitions of transient liquid phase additives during the sintering process, where these additives melt, flow to fill interfaces, and then resolidify to form strong ceramic bonds, enabling hermetic sealing through controlled thermal processing
3Object-affected harmful factors
If aluminum nitride components are exposed to harsh processing gases, then processing versatility is maintained, but corrosion resistance is compromised
Solution Approach 1:
The patent creates composite ceramic structures combining aluminum nitride with corrosion-resistant ceramic materials, forming a composite that maintains the thermal conductivity of AlN while providing chemical resistance to harsh processing gases through the protective ceramic matrix
4Manufacturing precision
If non-uniform shrinkage occurs during ceramic firing, then manufacturing simplicity is maintained, but structural uniformity deteriorates
Solution Approach 1:
The patent applies local quality control by using transient liquid phase additives specifically at bonding interfaces and incorporating uniform shrinkage control agents throughout the ceramic body, ensuring localized bonding strength while maintaining overall dimensional uniformity during firing
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances the hermetic joining of ceramic components, maintains thermal uniformity, and extends the operational life of susceptor components by preventing structural disuniformities and corrosion, allowing for more efficient and reliable temperature control across multiple regions.
Implementation Method 1
a transient liquid phase promoting additive is used between ceramic components to facilitate a hermetic ceramic weld during firing
Implementation Method 2
preventing oxidation of tungsten by maintaining a controlled atmosphere
Implementation Method 3
enhances the operational life of susceptor components by maintaining thermal conductivity
Data Source
AI summary
A monolithic, substantially hermetic joining or bonding of two or more aluminum nitride (“AlN”) ceramic components is made by promoting transient liquid phase sintering near the contact areas between the components. In a first approach, AlN particles are combined with a rare earth oxide sintering additive such as yttrium oxide (Y2O3) in a joining paste can be applied between the joining surfaces of fired ceramic preformed components prior to final firing to weld the components together. In a second approach, the additive is added to green mixture, and the components having different shrinkage aspect ratios are mated and cofired in an atmosphere containing a partial pressure of the additive. The additive encourages wetting and diffusion of the liquid phases present on the surfaces of ceramic interface particles in the contact areas during final firing.