Alternating Pressure Filter Wetting for Bubble Removal
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Solution Overview
Problem
In semiconductor manufacturing, the process of removing bubbles from filter units in liquid chemical supply apparatuses is inefficient, leading to high liquid consumption and prolonged operational times, especially when the filter units are newly mounted or replaced.
Innovation Solution
A method involving a process liquid supply apparatus with a filter unit, a discharge outlet for gas, and a liquid sending unit, where the filter unit is filled with process liquid and subjected to alternating depressurization and pressurization filtering processes to efficiently remove bubbles, reducing liquid consumption and operative time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If filtering is performed under positive pressure using N2 gas or pump pressure after setting the filter unit, then the process liquid permeates through the filter unit, but the amount of process liquid consumed increases and the operative time is prolonged
Solution Approach 1:
The patent applies periodic action by alternating between pressurization and depressurization phases during the filter wetting process. The control unit repeatedly switches between applying positive pressure (via N2 gas or pump) and creating negative pressure (via exhaust pump), causing the process liquid to alternately permeate through and be suctioned from the filter unit. This periodic cycling enhances bubble removal efficiency while reducing the total amount of process liquid consumed compared to continuous positive pressure filtering.
Solution Approach 2:
The patent changes the pressure parameter dynamically during the filter wetting process. The control unit adjusts the pressure from positive (during permeation phase) to negative (during suction phase) by switching between the pressure source (N2 gas/pump) and the exhaust pump. This parameter change enables more effective bubble removal at lower overall liquid consumption by utilizing the pressure differential to draw liquid through the filter rather than relying solely on continuous positive pressure.
2Reliability
If filtering is performed under positive pressure using N2 gas or pump pressure after setting the filter unit, then the process liquid permeates through the filter unit, but the operative time is prolonged
Solution Approach 1:
The patent applies periodic action by alternating between pressurization and depressurization phases during the filter wetting process. The control unit repeatedly switches between applying positive pressure (via N2 gas or pump) and creating negative pressure (via exhaust pump), causing the process liquid to alternately permeate through and be suctioned from the filter unit. This periodic cycling enhances bubble removal efficiency while reducing the total amount of process liquid consumed compared to continuous positive pressure filtering.
Solution Approach 2:
The patent applies the skipping principle by rapidly alternating between pressurization and depressurization phases, allowing the filter wetting process to complete more quickly. The control unit performs multiple rapid cycles of pressure application and exhaust, enabling the process liquid to quickly permeate through the filter unit and remove bubbles without prolonged exposure to single-direction pressure. This rushed alternating action reduces operative time while maintaining effective bubble removal.
3Reliability
If the filter unit has repetitive prominences and depressions on wall surface to reduce bubbles, then bubble removal improves, but manufacturing complexity increases
Solution Approach 1:
The patent replaces the mechanical structural solution (complex filter unit geometry with prominences and depressions) with a process-based solution (alternating pressure control). Instead of manufacturing a complex filter unit shape to trap and remove bubbles, the control unit uses automated switching between pressurization and depressurization modes to create pressure differentials that effectively remove bubbles from a simpler, easier-to-manufacture filter unit structure.
Solution Approach 2:
The patent changes the pressure parameter dynamically during the filter wetting process. The control unit adjusts the pressure from positive (during permeation phase) to negative (during suction phase) by switching between the pressure source (N2 gas/pump) and the exhaust pump. This parameter change enables more effective bubble removal at lower overall liquid consumption by utilizing the pressure differential to draw liquid through the filter rather than relying solely on continuous positive pressure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method significantly reduces the amount of process liquid required for bubble removal and shortens the operational time when filter units are newly mounted or replaced, enhancing the efficiency of the liquid chemical supply process.
Implementation Method 1
a depressurization filtering process depressurizing process liquid in a downstream side of the filter unit and thereby permeating through the filter unit
Implementation Method 2
a pressurization filtering process pressurizing process liquid from an upstream side of the filter unit and thereby permeating through the filter unit
Data Source
AI summary
According to an embodiment of the present disclosure, a process liquid supply apparatus operating method is provided. The method includes filling a filter unit with a process liquid from an upstream side of the filter unit to a downstream side of the filter unit after newly mounting or replacing the filter unit and repeating a depressurization filtering process and a pressurization filtering process for a predetermined number of times. The depressurization filtering process depressurizes the process liquid in the downstream side of the filter unit and thereby allows the process liquid to permeate through the filter unit. The pressurization filtering process pressurizes the process liquid from the upstream side of the filter unit and thereby allows the process liquid to permeate through the filter unit.