Microwave Sputtered Alumina Coatings for Erosion Resistance

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Solution Overview

Problem

Existing methods for depositing alumina coatings on zinc sulfide and zinc selenide substrates fail to achieve thick, durable, and uniformly adherent coatings that can withstand rain and sand erosion while maintaining high infrared transmission, particularly for applications in high-speed aeronautical vehicles.

Innovation Solution

The use of microwave assisted magnetron sputtering to deposit alumina coatings exceeding 20 μm thick at a rate of 60 Å/minute, allowing for large area coverage with low substrate heating and minimizing stress, combined with the application of alternating layers of monomer compositions for enhanced protection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional deposition processes (physical vapor deposition, sputtering, CVD) are used to deposit alumina coatings, then coatings of 20 μm or less can be produced, but thicker coatings cannot be achieved due to excessive interface stresses causing poor adhesion and non-uniform thickness

Engineering Contradiction:
Improvecoating thickness uniformityVSAvoidcoating adhesion
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent changes the deposition parameters by using microwave plasma field assistance combined with electron beam evaporation, operating at specific pressure ranges (1-100 mTorr), power levels (100-1000 Watts), and microwave frequencies (2.45 GHz) to enable thick coating deposition without interface stress failure

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent creates a composite coating system with alternating layers of alumina (hard, erosion-resistant) and polymer materials (flexible, stress-absorbing), where the polymer layers act as stress buffers between the rigid alumina layers and the substrate, preventing delamination in thick coatings

Inventive Principle:
Principle #40Composite materials

2Strength

If coating thickness is increased to improve rain and sand erosion resistance, then durability improves, but coating stress and risk of delamination increase

Engineering Contradiction:
Improveerosion resistanceVSAvoidcoating adhesion
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The patent incorporates polymer layers between alumina coating layers before the full stress cycle occurs during rain/sand impact. These polymer interlayers act as pre-positioned stress buffers that absorb and distribute mechanical stresses, preventing crack propagation and delamination under erosive conditions

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

Solution Approach 2:

The patent modifies the mechanical properties of the coating system by introducing polymer materials with appropriate elastic moduli and adhesion characteristics, changing the stress distribution profile through the coating thickness to accommodate thick alumina layers without failure

Inventive Principle:
Principle #35Parameter changes

3Productivity

If deposition rate is increased to improve productivity, then coating time decreases, but coating quality and uniformity may be compromised

Engineering Contradiction:
Improvedeposition rateVSAvoidcoating uniformity
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent merges two deposition techniques - electron beam evaporation (provides high deposition rate) and microwave plasma field assistance (provides excellent uniformity and adhesion). The electron beam evaporates alumina material rapidly while the microwave plasma field ensures uniform distribution and strong bonding, achieving both high productivity and high precision simultaneously

Inventive Principle:
Principle #5Merging (Combining)

4Area of stationary object

If large area substrates are coated, then application scope increases, but achieving uniform thickness and reliable adhesion becomes more difficult

Engineering Contradiction:
Improvesubstrate coverage areaVSAvoidcoating uniformity
Core Design Contradiction:
Area of stationary objectVSManufacturing precision

Solution Approach 1:

The patent uses a continuous microwave plasma field that maintains active reactive species throughout the deposition chamber, ensuring continuous and uniform coating action across large substrate areas. The plasma field continuously replenishes reactive aluminum and oxygen species, maintaining uniform deposition rates across the entire substrate surface regardless of size

Inventive Principle:
Principle #20Continuity of useful action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method results in durable alumina coatings that maintain high transmission in the desired wavelength ranges, withstand rain and sand impact, and reduce scatter, making them suitable for high-speed aeronautical applications.

Implementation Method 1

depositing a layer of alumina greater than 20 μm thick on the zinc sulfide or zinc selenide at a deposition rate of 60 Å/minute or greater by microwave assisted magnetron sputtering

Methodology Applied
Scientific EffectSputtering: Sputtering

Implementation Method 2

microwave assisted magnetron sputtering

Methodology Applied
Scientific EffectMicrowave radiation: Microwave Radiation

Implementation Method 3

allowing for large area coverage with low substrate heating

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Data Source

PatentUS9410238B2Method of making durable articles
Publication Date: 2016.08.09 HELLMA MATERIALS GMBH & CO KG

AI summary

Optical articles of zinc sulfide and zinc selenide with thick coatings of alumina are disclosed. The alumina coatings are deposited on the zinc sulfide and zinc selenide by a microwave assisted magnetron sputtering. In addition to alumina coatings, the optical articles may also include various polymer coatings.