Aluminium Alloy Vacuum Chamber Elements High Temperature Creep Resistance
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Solution Overview
Problem
Current vacuum chamber elements for semiconductor manufacturing and photovoltaic panels face challenges in achieving high resistance to creep deformation at high temperatures while maintaining corrosion resistance and uniform properties suitable for machining.
Innovation Solution
A specific 6xxx series aluminum alloy with a grain size of at least 350 μm in thickness, composed of Si: 0.4-0.7%, Mg: 0.4-1.0%, Ti: 0.01-0.15%, Fe: 0.08-0.25%, Cu < 0.35%, Mn < 0.4%, Cr < 0.25%, Zn < 0.04%, and other elements < 0.05%, is used, along with a manufacturing process involving rolling, solution treatment, quenching, and anodization to enhance mechanical and corrosion properties.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If aluminum alloy sheets with high Mg content are used to improve creep resistance at high temperatures, then resistance to creep deformation is improved, but corrosion resistance deteriorates
Solution Approach 1:
The patent applies parameter changes by precisely controlling the Mg content range (0.4-1.0%) and Si content range (0.4-0.7%) to achieve optimal balance between creep resistance and corrosion resistance. The Mg/Si ratio control (<1.8) further refines this balance, allowing the alloy to exhibit both high temperature stability and corrosion resistance through optimized compositional parameters.
Solution Approach 2:
The patent creates a composite alloy system combining Al with specific proportions of Mg, Si, Ti, Fe, Cu, Mn, and Cr elements. This composite material approach allows synergistic effects where Mg provides creep resistance while Si and other elements contribute to corrosion resistance and grain structure control, achieving properties superior to simple aluminum or aluminum-magnesium alloys.
2Strength
If the grain size is increased to improve high temperature stability, then resistance to creep deformation is improved, but machinability deteriorates
Solution Approach 1:
The patent controls grain size within a specific range (≥350 μm in thickness) through controlled rolling and heat treatment parameters. This parameter optimization ensures sufficient high-temperature stability while maintaining uniform properties that facilitate machining operations, avoiding both excessive grain growth and fine grain structures that would compromise respective properties.
Solution Approach 2:
Instead of using very fine grains to improve machinability (which would reduce high-temperature stability), the patent inverts the approach by using relatively large grains (≥350 μm) that provide excellent high-temperature stability, while compensating for machinability through uniform property distribution achieved by controlling other alloying elements and processing parameters.
3Strength
If alloying elements are added to improve mechanical properties, then strength and creep resistance are improved, but manufacturing cost increases
Solution Approach 1:
The patent optimizes the concentrations of alloying elements within specific ranges: Mg (0.4-1.0%), Si (0.4-0.7%), Ti (0.01-0.15%), Fe (0.08-0.25%), Cu (<0.35%), Mn (<0.4%), and Cr (<0.25%). This parameter optimization achieves the required mechanical properties while avoiding excessive additions that would significantly increase material cost, representing a cost-performance balance.
Solution Approach 2:
The patent employs a multi-element composite alloy system where each element serves specific functions: Mg for creep resistance, Si for corrosion resistance and grain refinement, Ti and Fe for grain structure control, and small amounts of Cu, Mn, and Cr for property enhancement. This composite approach achieves superior mechanical properties through synergistic effects rather than relying on large quantities of any single expensive element.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides vacuum chamber elements with improved resistance to creep deformation at high temperatures, enhanced corrosion resistance, and uniform properties, ensuring high performance and durability in harsh environments.
Implementation Method 1
solution treatment
Implementation Method 2
quenching
Implementation Method 3
anodization
Implementation Method 4
aluminum alloy of composition, in % by weight, Si: 0.4 - 0.7; Mg: 0.4 - 1.0; the ratio in % by weight Mg/Si being less than 1.8; Ti: 0.01 - 0.15, Fe 0.08 - 0.25
Data Source
Figure 1~2
Figure 3A~3B
Figure 4
AI summary
The invention relates to a vacuum chamber element obtained by machining and surface treatment of sheet metal with a thickness of at least 10 mm made of aluminium alloy with the following composition, as wt%: Si: 0.4 – 0.7; Mg: 0.4 – 1.0; the ratio of Mg/Si in wt% being less than 1.8; Ti: 0.01 – 0.15, Fe 0.08 – 0.25; Cu < 0.35; Mn < 0.4; Cr: < 0.25; Zn < 0.04; other elements < 0.05 each and < 0.15 in total, the remainder being aluminium, characterised in that the grain size of said sheet metal is such that the mean linear intercept length l measured on the L/TC plane according to the ASTM E112 standard, is at least 350 µm between surface and ½ thickness. The invention likewise relates to the method for manufacturing such a vacuum chamber element. The products according to the invention are particularly advantageous in their resistance to creeping at high temperature, while having high properties of corrosion resistance, uniformity of properties in the thickness, and machinability.