Aluminum Fluoride Hydroxide Coating Adhesion
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Solution Overview
Problem
Existing corrosion-resistant members used in semiconductor manufacturing processes, such as those disclosed in PTLs 1 to 3, face issues where the corrosion-resistant coating films tend to peel off from the base material due to thermal history.
Innovation Solution
A corrosion-resistant member is developed with a base material containing aluminum or an aluminum alloy, and a corrosion-resistant coating film composed of aluminum fluoride hydroxide AlF3-x(OH)x, where x is between 0.05 and 1.00, and the space group belongs to R-3c. An intermediate layer of magnesium fluoride is optionally included between the base material and the coating film.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a corrosion-resistant coating film containing aluminum fluoride or magnesium fluoride is formed on an aluminum base material, then corrosion resistance against halogen-based gases is improved, but the coating film peels off from the base material under thermal history
Solution Approach 1:
The invention changes the chemical composition parameters of the coating film by controlling the hydroxide content (x value in AlF3-x(OH)x between 0.05 and 1.00) and specifying the crystal structure (space group R-3c). This parameter optimization ensures the coating maintains both corrosion resistance and adhesion under thermal conditions.
Solution Approach 2:
The invention creates a composite coating system consisting of aluminum fluoride hydroxide with specific crystal structure properties. The composite nature of incorporating hydroxide groups into the aluminum fluoride lattice structure provides both corrosion protection and thermal stability for adhesion.
2Stability of the object's composition
If an intermediate layer containing magnesium fluoride is added between the base material and coating film, then adhesion under thermal history is improved, but device complexity increases
Solution Approach 1:
The invention introduces magnesium fluoride as an intermediate layer between the aluminum base material and the aluminum fluoride hydroxide coating film. This intermediate layer acts as a mediator that improves adhesion under thermal history by providing a transition zone with compatible thermal expansion properties.
Solution Approach 2:
The coating system is segmented into distinct functional layers: the aluminum alloy base material, the magnesium fluoride intermediate layer, and the aluminum fluoride hydroxide outer coating film. This segmentation allows each layer to perform its specific function optimally while maintaining overall system performance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The corrosion-resistant coating film is less likely to peel off from the base material even under thermal history conditions, providing enhanced corrosion resistance against halogen-based gases and plasmas, and reducing particle generation.
Implementation Method 1
the corrosion-resistant coating film contains aluminum fluoride hydroxide AlF3-x(OH)x in which a space group belongs to R-3c, and x in the AlF3-x(OH)x is 0.05 or more and 1.00 or less
Data Source
AI summary
There is provided a corrosion-resistant member in which a corrosion-resistant coating film is less likely to peel off from a base material even when the corrosion-resistant member is subjected to a thermal history. The corrosion-resistant member includes: a base material (10) containing aluminum or an aluminum alloy; and a corrosion-resistant coating film (20) formed on the surface of the base material (10), in which the corrosion-resistant coating film (20) contains aluminum fluoride hydroxide AlF3-x(OH)x in which a space group belongs to R-3c, and x in the chemical formula is 0.05 or more and 1.00 or less.