Alumite Vacuum Component Particle Prevention
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Solution Overview
Problem
The generation of particles in vacuum apparatuses with alumite-treated components is difficult to prevent, especially in newly shipped units, as existing techniques like introducing inert gases and reducing pressure are inadequate.
Innovation Solution
A method involving evacuation to reduce pressure to 1.3×10−1 Pa, followed by increasing pressure to atmospheric levels to cause moisture adhesion on alumite-treated components, effectively preventing particle generation by repeated cycles of evacuation and exposure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If existing techniques like introducing inert gases and reducing pressure are used, then the vacuum apparatus can operate, but particle generation cannot be adequately prevented
Solution Approach 1:
The patent applies preliminary action by performing moisture adhesion treatment on alumite-treated components before vacuum processing. This preliminary moisture introduction prevents particle generation during subsequent vacuum operations, as the moisture forms a protective layer that prevents particle formation from the alumite surface.
Solution Approach 2:
The patent applies preliminary anti-action by introducing moisture to counteract the particle-generating properties of alumite-treated surfaces. The moisture adheres to the alumite component and prevents particle generation, effectively neutralizing the harmful effect of the alumite treatment before vacuum processing begins.
2Reliability
If pressure is reduced to less than or equal to 1.3×10−1 Pa to remove moisture, then particle generation is prevented, but additional process steps are required
Solution Approach 1:
The patent applies parameter changes by controlling the pressure threshold at 1.3×10−1 Pa (1 mTorr) as a critical parameter for moisture removal. By establishing this specific pressure threshold, the method provides a clear, quantifiable criterion for determining when moisture has been sufficiently removed, simplifying process control despite the additional steps required.
3Object-affected harmful factors
If moisture is not removed from alumite components, then particle generation occurs, but complete moisture removal is difficult to achieve
Solution Approach 1:
The patent replaces mechanical moisture removal methods (continuous pumping) with a chemical/physical approach using moisture adhesion. Instead of attempting to mechanically remove all moisture through prolonged evacuation, the method introduces moisture that adheres to the alumite surface, creating a controlled moisture layer that prevents particle generation without requiring complete moisture removal.
Solution Approach 2:
The patent changes the approach from moisture removal to moisture control by establishing a specific pressure threshold (1.3×10−1 Pa). This parameter change allows for sufficient moisture management to prevent particle generation without requiring complete moisture elimination, making the process more achievable and controllable.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method significantly reduces particle generation by adequately removing moisture from alumite components, ensuring the vacuum apparatus operates effectively and preventing yield reduction, thereby improving productivity.
Implementation Method 1
an evacuation step of evacuating the vacuum apparatus to reduce a pressure within the vacuum apparatus to less than or equal to 1.3×10−1 Pa (1 mTorr)
Implementation Method 2
a moisture adhesion step of causing moisture to adhere to the alumite-treated component after the pressure increasing step
Data Source
AI summary
A particle generation preventing method for preventing particle generation in a vacuum apparatus including an alumite-treated component is provided. The particle generation preventing method includes an evacuation step of evacuating the vacuum apparatus to reduce a pressure within the vacuum apparatus to less than or equal to 1.3×10−1 Pa (1 mTorr), a pressure increasing step of increasing the pressure within the vacuum apparatus to atmospheric pressure after the evacuation step, and a moisture adhesion step of causing moisture to be adhered to the alumite-treated component after the pressure increasing step.