Airborne Molecular Contamination Measurement Station
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Solution Overview
Problem
Existing measurement stations for airborne molecular contamination in cleanrooms face challenges in efficiently measuring a wide range of gaseous species across multiple test zones due to long sampling lines, which lead to delayed and potentially inaccurate measurements.
Innovation Solution
The proposed measurement station incorporates at least two calibrated orifices connected in parallel to the input of a conditioning pump, along with controllable isolation valves and a distributor to ensure continuous pumping of all sampling lines, optimizing measurement efficiency and reducing the risk of cross-contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple sampling lines are used to cover multiple test zones, then the coverage of measurement zones is improved, but the measurement time is increased due to the lengthy sampling lines
Solution Approach 1:
The patent applies preliminary action by continuously pumping sampling lines with a conditioning pump before measurements are taken. This pre-conditioning of the sampling lines removes adsorbed gases and prepares the lines for accurate measurement, allowing the system to quickly switch between different test zones without waiting for the lines to be fully flushed during measurement transitions.
Solution Approach 2:
The patent implements continuity of useful action by maintaining continuous pumping operation in all sampling lines through the conditioning pump. This ensures that the sampling lines are constantly being conditioned and ready for measurement, eliminating dead time between measurements and allowing rapid switching between different test zones while maintaining measurement accuracy.
2Adaptability or versatility
If sampling lines are made longer to reach distant test zones, then the coverage area is improved, but the adsorption of gaseous species on line walls is increased
Solution Approach 1:
The patent applies preliminary action by continuously pumping the sampling lines with the conditioning pump before measurements are taken. This pre-conditioning step removes adsorbed gaseous species from the line walls, ensuring that when measurements are performed in distant test zones, the sampling lines do not introduce adsorption errors that would compromise measurement accuracy.
Solution Approach 2:
The patent implements continuity of useful action by maintaining continuous pumping operation in all sampling lines through the conditioning pump. This ensures that the sampling lines are constantly being conditioned and ready for measurement, eliminating dead time between measurements and allowing rapid switching between different test zones while maintaining measurement accuracy.
3Device complexity
If a common discharge is used for all sampling lines, then the device complexity is reduced, but the measurement precision is compromised due to memory effects in the sampling lines
Solution Approach 1:
The patent applies segmentation by separating the conditioning function from the measurement function. The conditioning pump with calibrated orifices handles the conditioning of sampling lines, while the gas analyser handles the measurement. This segmentation allows independent optimization of conditioning and measurement processes, preventing memory effects from compromising measurement precision while maintaining system simplicity.
Solution Approach 2:
The patent introduces an intermediary system consisting of the conditioning pump and calibrated orifices between the sampling lines and the gas analyser. This intermediary conditioning system prepares the sampling lines by removing adsorbed gases, acting as a buffer that prevents memory effects from reaching the measurement device and compromising precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures effective conditioning and rapid readiness of sampling lines for measurements, optimizing the measurement station's rate and reducing costs by eliminating the need for complex valve systems and minimizing labor and maintenance requirements.
Implementation Method 1
a conditioning pump (3), characterized in that the measurement station also comprises: at least two calibrated orifices (C1-C64) connected in parallel to the input of the conditioning pump (3)
Implementation Method 2
at least two calibrated orifices (C1-C64) connected in parallel to the input of the conditioning pump (3)
Data Source
AI summary
A measurement station for measuring airborne molecular contamination includes at least one gas analyser, at least two controllable isolation valves connected in parallel to the input of the at least one gas analyser, a conditioning pump, at least two calibrated orifices connected in parallel to the input of the conditioning pump, at least one distributor to connect each controllable isolation valve with, on one side, a sampling line and, on the other side, a calibrated orifice, and a control unit linked to the controllable isolation valves. The control unit commands the opening or the closing of the controllable isolation valves in order to be able to connect the at least one gas analyser with at least one sampling line.