Aminosilane Surface Treatment Agent for Hydrophobization
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Solution Overview
Problem
Current surface treatment agents fail to effectively hydrophobize substrate surfaces made of silicon and titanium nitride, especially when treated with hydrofluoric acid, leading to pattern collapse during semiconductor manufacturing due to insufficient reduction of surface tension forces between inorganic patterns.
Innovation Solution
A surface treatment agent containing monosilane or bissilane compounds with dimethylamino groups is used to hydrophobize substrate surfaces, specifically formulated to achieve high hydrophobicity on silicon and titanium nitride surfaces, even after hydrofluoric acid treatment, by vaporizing or coating the agent onto the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional silylation agents (HMDS, DMATMS) are used for hydrophobization treatment, then silicon substrate surfaces can be effectively hydrophobized, but titanium nitride and silicon nitride substrate surfaces cannot be sufficiently hydrophobized
Solution Approach 1:
The patent changes the chemical parameters of the silylation agent by introducing compounds with specific functional groups (aminosilane, alkoxysilane, halosilane) that can adapt to different substrate materials. The general formula R3-aSiX3-a allows systematic variation of chemical properties to match different substrate surfaces, enabling effective hydrophobization across silicon, titanium nitride, and silicon nitride materials.
Solution Approach 2:
The patent employs composite surface treatment by combining multiple types of silylation agents (aminosilane, alkoxysilane, halosilane) in a coordinated manner. This composite approach creates a synergistic effect where different agent types address different substrate materials, achieving comprehensive hydrophobization that individual agents cannot accomplish alone.
2Manufacturing precision
If hydrofluoric acid treatment is applied to form inorganic patterns, then pattern formation is achieved, but subsequent hydrophobization by silylation agents becomes significantly more difficult
Solution Approach 1:
The patent applies preliminary hydrophobization treatment immediately after hydrofluoric acid etching while the substrate surface is still in a reactive state. This timing captures the surface before complete oxidation or contamination occurs, making the subsequent silylation reaction more effective and reducing the overall manufacturing difficulty.
Solution Approach 2:
The patent modifies the chemical parameters of the silylation process by selecting agents with specific reactivity levels that can effectively bond to hydrofluoric acid-treated surfaces. The use of multiple X groups (OR, NR2, halogen) provides different reactivity profiles that can be matched to the activated surface state after etching.
3Productivity
If rinse liquid is removed by drying after pattern formation, then the rinsing process is completed, but surface tension forces cause pattern collapse
Solution Approach 1:
The patent applies hydrophobization treatment as a preliminary step before the drying process. This creates a protective surface layer that prevents capillary forces from causing pattern collapse during rinse liquid removal, ensuring pattern structural integrity is maintained throughout the drying phase.
Solution Approach 2:
The silylation agent acts as an intermediary substance between the substrate surface and the rinse liquid. It forms a hydrophobic barrier layer that mediates the interaction, allowing complete rinsing while preventing the surface tension forces from directly acting on and collapsing the delicate inorganic patterns during drying.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The surface treatment agent significantly reduces the force between inorganic patterns during drying, preventing pattern collapse and improving adhesion, as demonstrated by increased contact angles and effective hydrophobization of substrates with silicon and titanium nitride surfaces.
Implementation Method 1
a surface treatment agent used in hydrophobization treatment of a substrate surface includes a compound represented by the following formula (1) or (2) R1aSi[N(CH3)2]4-a
Implementation Method 2
hydrophobization treatment of a substrate surface... significantly reduces the force between inorganic patterns during drying, preventing pattern collapse and improving adhesion
Implementation Method 3
pattern collapse is a phenomenon when forming several inorganic patterns on a substrate in parallel, in which adjacent patterns close in so as to lean on one another... stress based on the surface tension of the rinse liquid acts between patterns
Data Source
AI summary
A monosilane compound or bissilane compound of a specific structure having dimethylamino groups is contained in a surface treatment agent used in the hydrophobization treatment of substrate surfaces.