Ammonium Salt Solidifying Agent Substrate Drying Method
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Solution Overview
Problem
Conventional substrate drying methods like spin drying and IPA drying can cause pattern collapse due to Laplace pressures, and silylation is not applicable to all materials, while solidification drying faces challenges with handling sublimation agents requiring a decompression chamber.
Innovation Solution
A substrate treatment method involving the application of a solidifying agent containing liquid, such as ammonium salts, which precipitates and then decomposes upon heating to gasify, avoiding pattern collapse and eliminating the need for a decompression chamber by using easily handled inorganic substances.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If spin drying or IPA drying is used to dry the substrate surface, then the drying process is simple and fast, but Laplace pressures cause pattern collapse
Solution Approach 1:
A solidifying agent (ammonium salt solution) is introduced as an intermediary substance between the liquid phase and gas phase during drying. The solidifying agent precipitates as solid particles that form a supportive matrix, preventing pattern collapse while enabling subsequent easy removal through decomposition, thus resolving the contradiction between fast drying and pattern integrity
Solution Approach 2:
The invention changes the physical and chemical parameters of the drying process by introducing a solidifying agent that alters the phase transition behavior. Instead of direct liquid-to-vapor transition causing Laplace pressure, the process transitions through a solid intermediate phase (precipitation followed by decomposition), eliminating the harmful pressure effects while maintaining drying efficiency
2Manufacturing precision
If silylation is applied to prevent pattern collapse, then pattern integrity is improved, but the method cannot be applied to materials that cannot be silylated
Solution Approach 1:
The solidifying agent-based drying method provides a universal solution applicable to all substrate materials regardless of their chemical composition. Unlike silylation which requires specific surface chemistry, the solidifying agent approach works with any material that can withstand the mild heating process, significantly expanding material compatibility while maintaining pattern integrity
3Manufacturing precision
If solidification drying with sublimation solidifying agent is used to prevent pattern collapse, then pattern integrity is improved, but handling becomes difficult and a decompression chamber is required
Solution Approach 1:
The invention uses ammonium salt solutions that decompose into harmless gases (ammonia, carbon dioxide, water vapor) at mild temperatures. This disposable approach eliminates the need for complex recovery systems or decompression chambers required by sublimation agents, greatly simplifying handling and equipment requirements while maintaining pattern protection
Solution Approach 2:
The invention changes the decomposition temperature parameter from the high temperatures required for sublimation to mild temperatures (below 100°C) sufficient for ammonium salt decomposition. This parameter change eliminates the need for decompression chambers and simplifies the entire handling process while achieving the same pattern protection effect
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method effectively prevents pattern collapse during substrate drying without requiring a decompression chamber, facilitating easy handling and efficient drying using inorganic substances like ammonium salts.
Implementation Method 1
supplying a solidifying agent containing liquid that contains a solidifying agent to the cleaned and rinsed surface of the substrate; precipitating the solidifying agent as solid on the surface of the substrate
Implementation Method 2
decomposing and gasifying the solid to remove the solid from the surface of the substrate; the solidifying agent contains an ammonium salt
Data Source
AI summary
In one embodiment, a substrate treatment apparatus includes cleaning and rinse modules configured to clean and rinse a surface of a substrate provided with a pattern, and a solidifying agent containing liquid supplying module configured to supply a solidifying agent containing liquid that contains a solidifying agent to the cleaned and rinsed surface of the substrate. The apparatus further includes a precipitation module configured to precipitate the solidifying agent as solid on the surface of the substrate, and a decomposition module configured to decompose and gasify the solid to remove the solid from the surface of the substrate. The solidifying agent contains an ammonium salt, and the ammonium salt contains an ammonium ion or an ion having a structure in which at least one of four hydrogen atoms of an ammonium ion is substituted with another atom or atom group.