Amorphous Diaphragm Electron Beam Device for Gas Atmosphere Observation
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Solution Overview
Problem
Existing electron beam devices face issues with diaphragm breakage under high pressure and image degradation due to electron beam scattering when using thick diaphragms, while thin diaphragms are prone to breakage, and prior methods do not effectively maintain a gas atmosphere for high-resolution observation.
Innovation Solution
An electron beam device with a sample holding mechanism that uses thin, amorphous diaphragms made of light elements like carbon, oxide, or nitride films, and a gas supply system to create a controlled atmospheric cell within the sample chamber, employing gases with low electron beam scattering ability like hydrogen or nitrogen to maintain the gas atmosphere and prevent diaphragm breakage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a thick diaphragm is used to prevent breakage under high pressure, then the reliability of the diaphragm is improved, but the image quality deteriorates due to electron beam scattering
Solution Approach 1:
The patent changes the material parameters of the diaphragm by using amorphous films made of light elements (carbon, oxide, nitride) instead of conventional thick materials. This parameter change allows the diaphragm to be sufficiently thin to transmit electron beams with minimal scattering while maintaining adequate strength through the unique properties of amorphous light element materials.
Solution Approach 2:
The patent employs composite material strategies by using amorphous films of light elements that combine low atomic number (reducing electron scattering) with sufficient mechanical strength. The amorphous structure itself acts as a composite approach, providing both thinness for beam transmission and structural integrity for pressure resistance.
2Measurement precision
If a thin diaphragm is used to improve image quality by reducing electron beam scattering, then the observation resolution is improved, but the diaphragm reliability deteriorates due to breakage under high pressure
Solution Approach 1:
The patent changes the material parameters by selecting amorphous films of light elements with specific properties: low atomic number for minimal electron scattering and sufficient strength-to-thickness ratio for pressure resistance. This parameter optimization allows thin diaphragms to achieve both high image quality and adequate reliability.
Solution Approach 2:
The patent replaces conventional mechanical diaphragm structures with amorphous film materials that achieve structural integrity through material properties rather than thickness. The amorphous structure provides mechanical strength without requiring the thickness that would cause electron beam scattering.
3Adaptability or versatility
If a gas atmosphere is introduced for observing sample reactions, then the applicability to practical conditions is improved, but the diaphragm reliability deteriorates due to high pressure breakage
Solution Approach 1:
The patent changes the diaphragm material parameters to amorphous films of light elements that can withstand the pressure of introduced gas atmospheres while remaining thin enough for electron beam transmission. This enables gas atmosphere observations without diaphragm breakage.
Solution Approach 2:
The amorphous diaphragm film acts as an intermediary that separates the gas atmosphere side from the vacuum side while withstanding the pressure difference. The light element composition and amorphous structure provide the necessary mechanical strength to mediate between the high-pressure gas environment and the vacuum chamber.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables high-resolution observation of sample reactions in a controlled gas atmosphere without diaphragm breakage, allowing for precise pressure control and immediate analysis post-reaction with reduced electron beam scattering, thus enhancing observation and analysis capabilities.
Implementation Method 1
a first diaphragm 18 is arranged above the sample 20 and a second diaphragm 18 is arranged below the sample 20, so as to isolate a gas atmosphere and a vacuum of a sample chamber 14 from each other and to constitute a cell 19 sealing the atmosphere around the sample 20, with each diaphragm 18 being formed of an amorphous film of a light element such as a carbon film, an oxide film and a nitride film transmitting an electron beam
Implementation Method 2
furnishes a sample holding means with a gas supply means for supplying a gas to a sample and an exhaust means for exhausting the gas, arranges diaphragms above and below the sample to isolate a gas atmosphere and the vacuum of the sample chamber
Implementation Method 3
an electron beam device for observing a sample by using electron beams
Data Source
AI summary
An object of the invention is to provide an electron beam device and a sample holding device for the electron beam device that can observe the reaction between a sample and a gas at high resolution while a gas atmosphere is maintained even by using thin diaphragms.To solve one of the problems described above, in an electron beam device having the function of separately exhausting an electron beam irradiation portion of an optical column, a sample chamber and an observation chamber, a gas supply means for supplying a gas to a sample and an exhaust means for exhausting a gas are provided to sample holding means, diaphragms are disposed above and below the sample to separate the gas atmosphere and vacuum of the sample chamber and to constitute a cell sealing the atmosphere around the sample, and a mechanism for spraying a gas is provided to the outside of the diaphragms. The gas sprayed outside the diaphragms has low electron beam scattering performance such as hydrogen, oxygen or nitrogen. The diaphragm is an amorphous film formed of a light element such as a carbon film, an oxide film and a nitride film capable of transmitting the electron beam.