Amorphous TiOxCl Electrode Fabrication via ALD

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current electrode materials for ion insertion type batteries, such as TiOx, face challenges with poor rate performance due to low electronic and Li-ion conductivity, requiring methods like doping, nanostructuring, or forming composites to enhance conductivity and capacity, but these approaches often increase costs and parasitic capacity losses.

Innovation Solution

The development of amorphous titanium oxide electrodes with a chlorine content ratio of 0.06 to 0.1, deposited using Atomic Layer Deposition at low temperatures, which improves electronic and ion conductivity without the need for nanostructuring or carbon composites, enabling high storage capacity and rate performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If doping, nanostructuring or carbon composites are used to enhance conductivity and capacity, then rate performance and storage capacity are improved, but manufacturing complexity and cost increase

Engineering Contradiction:
Improverate performanceVSAvoidmanufacturing complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent changes the chemical composition parameter by incorporating chlorine into the TiOx lattice, forming TiOxCl0.06-0.1. This compositional modification directly enhances electronic conductivity and Li-ion diffusion without requiring complex nanostructuring or carbon composite formation, thus improving rate performance while avoiding increased manufacturing complexity

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent introduces chlorine specifically at the atomic level within the TiOx crystal structure, creating localized compositional variation that enhances conductivity properties. This targeted atomic-level modification achieves the desired performance improvement without the need for extensive structural complexity or additional composite materials

Inventive Principle:
Principle #3Local quality

2Productivity

If nanosizing is used to reduce diffusion path, then storage capacity is enhanced, but parasitic capacity losses increase due to enhanced surface area

Engineering Contradiction:
Improvestorage capacityVSAvoidparasitic capacity losses
Core Design Contradiction:
ProductivityVSLoss of energy

Solution Approach 1:

The patent modifies the bulk compositional parameter by incorporating chlorine into the TiOx structure, which enhances ionic and electronic conductivity throughout the material. This bulk property modification reduces diffusion resistance without increasing surface area, thereby improving storage capacity while avoiding the parasitic losses associated with nanosizing

Inventive Principle:
Principle #35Parameter changes

3Productivity

If amorphous TiOx is used instead of crystalline TiOx, then rate performance is improved, but electronic conductivity remains insufficient

Engineering Contradiction:
Improverate performanceVSAvoidelectronic conductivity
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent changes the compositional parameter by incorporating chlorine into amorphous TiOx, forming TiOxCl0.06-0.1. This compositional modification directly enhances electronic conductivity in the amorphous phase, achieving the dual benefit of improved rate performance (inherent to amorphous structure) and sufficient electronic conductivity (achieved through chlorine doping)

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The amorphous titanium oxide electrodes with controlled chlorine content achieve a high storage capacity and rate performance, maintaining capacity retention at increased charging rates and reducing costs by avoiding the need for complex nanostructuring or carbon composites, while being compatible with solid-state electrolytes and preventing material oxidation.

Implementation Method 1

improves electronic and ion conductivity

Methodology Applied
Scientific EffectElectronic conduction: Conduction (electrical)

Implementation Method 2

the ion conduction (ion diffusion) may be facilitated

Methodology Applied
Scientific EffectIon diffusion: Diffusion

Implementation Method 3

deposited using Atomic Layer Deposition at low temperatures

Methodology Applied
Scientific EffectAtomic Layer Deposition: Chemical Vapour Deposition

Data Source

PatentEP3479426B1Ion insertion battery electrode and method of fabrication
Publication Date: 2022.01.19 INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW)
  • EP3479426B1 patent drawingFigure 1~2
  • EP3479426B1 patent drawingFigure 3~4
  • EP3479426B1 patent drawingFigure 5~6

AI summary

Ion insertion battery electrode and method of fabrication The present disclosure relates to electrode layers of ion insertion type batteries and to electrode layer materials wherein the electrode layer materials have a good electronic conductivity and a good ion conductivity, and wherein the electrode layers offer a good rate performance and a high storage capacity. The disclosure further relates to ion insertion type battery cells and batteries comprising such electrode layers, e.g. as an anode. The disclosure further relates to methods for forming such electrode layers and to methods for fabricating ion insertion type battery cells and batteries. Electrode layers according to the present disclosure comprise titanium oxide comprising chlorine and may be deposited by Atomic Layer Deposition at temperatures lower than 150°C.